JPS57208153A - Inspecting method for defective aluminum pattern of semiconductor or the like - Google Patents

Inspecting method for defective aluminum pattern of semiconductor or the like

Info

Publication number
JPS57208153A
JPS57208153A JP9228181A JP9228181A JPS57208153A JP S57208153 A JPS57208153 A JP S57208153A JP 9228181 A JP9228181 A JP 9228181A JP 9228181 A JP9228181 A JP 9228181A JP S57208153 A JPS57208153 A JP S57208153A
Authority
JP
Japan
Prior art keywords
bright
visual field
circuit
patterns
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9228181A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6150383B2 (enrdf_load_stackoverflow
Inventor
Satoshi Fushimi
Nobuyuki Akiyama
Yasuo Nakagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9228181A priority Critical patent/JPS57208153A/ja
Publication of JPS57208153A publication Critical patent/JPS57208153A/ja
Publication of JPS6150383B2 publication Critical patent/JPS6150383B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP9228181A 1981-06-17 1981-06-17 Inspecting method for defective aluminum pattern of semiconductor or the like Granted JPS57208153A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9228181A JPS57208153A (en) 1981-06-17 1981-06-17 Inspecting method for defective aluminum pattern of semiconductor or the like

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9228181A JPS57208153A (en) 1981-06-17 1981-06-17 Inspecting method for defective aluminum pattern of semiconductor or the like

Publications (2)

Publication Number Publication Date
JPS57208153A true JPS57208153A (en) 1982-12-21
JPS6150383B2 JPS6150383B2 (enrdf_load_stackoverflow) 1986-11-04

Family

ID=14050014

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9228181A Granted JPS57208153A (en) 1981-06-17 1981-06-17 Inspecting method for defective aluminum pattern of semiconductor or the like

Country Status (1)

Country Link
JP (1) JPS57208153A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59200908A (ja) * 1983-04-28 1984-11-14 Hitachi Ltd ウエハの照明方法およびその装置
JPS60124833A (ja) * 1983-12-09 1985-07-03 Hitachi Ltd 多層回路パターン検査装置
JPH01140047A (ja) * 1987-11-27 1989-06-01 Hitachi Ltd 透明薄膜中における塊状粒子検出方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5238887A (en) * 1975-09-23 1977-03-25 Agency Of Ind Science & Technol Apparatus for inspection of pattern defects

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5238887A (en) * 1975-09-23 1977-03-25 Agency Of Ind Science & Technol Apparatus for inspection of pattern defects

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59200908A (ja) * 1983-04-28 1984-11-14 Hitachi Ltd ウエハの照明方法およびその装置
JPS60124833A (ja) * 1983-12-09 1985-07-03 Hitachi Ltd 多層回路パターン検査装置
JPH01140047A (ja) * 1987-11-27 1989-06-01 Hitachi Ltd 透明薄膜中における塊状粒子検出方法

Also Published As

Publication number Publication date
JPS6150383B2 (enrdf_load_stackoverflow) 1986-11-04

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