JPS57202630A - Electrostatic deflector - Google Patents

Electrostatic deflector

Info

Publication number
JPS57202630A
JPS57202630A JP8762781A JP8762781A JPS57202630A JP S57202630 A JPS57202630 A JP S57202630A JP 8762781 A JP8762781 A JP 8762781A JP 8762781 A JP8762781 A JP 8762781A JP S57202630 A JPS57202630 A JP S57202630A
Authority
JP
Japan
Prior art keywords
deflection
axis
electrode
stripe
constitute
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8762781A
Other languages
Japanese (ja)
Other versions
JPH0353736B2 (en
Inventor
Hidekazu Goto
Takashi Soma
Masanori Idesawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RIKEN Institute of Physical and Chemical Research
Original Assignee
RIKEN Institute of Physical and Chemical Research
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RIKEN Institute of Physical and Chemical Research filed Critical RIKEN Institute of Physical and Chemical Research
Priority to JP8762781A priority Critical patent/JPS57202630A/en
Publication of JPS57202630A publication Critical patent/JPS57202630A/en
Publication of JPH0353736B2 publication Critical patent/JPH0353736B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
    • H01J29/70—Arrangements for deflecting ray or beam
    • H01J29/72—Arrangements for deflecting ray or beam along one straight line or along two perpendicular straight lines
    • H01J29/74—Deflecting by electric fields only

Landscapes

  • Electron Tubes For Measurement (AREA)

Abstract

PURPOSE:To achieve the deflection having the low astigmatism in the wide range by splitting the hollow cylindrical electrode into the specific number to provide the X, Y direction deflector electrodes alternatively while arranging each electrode stripe chip in the positional relation symmetrical against the axis positioned at the particular angular position from x, y axis. CONSTITUTION:The hollow cylindrical electrode is splitted into 4+8m(m=1,2,3, 4.) in parallel with the central axis, where every other stripe will constitute the deflection electrode in X direction while the remaining stripe will constitute the deflection electrode in Y direction and said stripes constituting the X, Y direction deflection electrodes are arranged in such positional relation as symmetrical against the axis positioned at the angular position of 45 deg. from x, y axis. Consequently the charged particle beam can be deflected with high accuracy and high speed while the high order Fourier component can be removed resulting in the deflection having low astigmatism in the wide range.
JP8762781A 1981-06-08 1981-06-08 Electrostatic deflector Granted JPS57202630A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8762781A JPS57202630A (en) 1981-06-08 1981-06-08 Electrostatic deflector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8762781A JPS57202630A (en) 1981-06-08 1981-06-08 Electrostatic deflector

Publications (2)

Publication Number Publication Date
JPS57202630A true JPS57202630A (en) 1982-12-11
JPH0353736B2 JPH0353736B2 (en) 1991-08-16

Family

ID=13920210

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8762781A Granted JPS57202630A (en) 1981-06-08 1981-06-08 Electrostatic deflector

Country Status (1)

Country Link
JP (1) JPS57202630A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6067867A (en) * 1983-09-22 1985-04-18 Konishiroku Photo Ind Co Ltd Electric field forming apparatus
JP2005521215A (en) * 2002-03-21 2005-07-14 エルメス−マイクロビジョン・（タイワン）・インコーポレーテッド Electro-optical focusing, deflection, signal acquisition system and method for swinging objective decelerating immersion lens
US7473905B2 (en) 2005-10-04 2009-01-06 Jeol Ltd. Electrostatic deflector
EP4303907A1 (en) 2022-07-06 2024-01-10 Universität Hamburg Electrostatic deflector for charged particle optics

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6067867A (en) * 1983-09-22 1985-04-18 Konishiroku Photo Ind Co Ltd Electric field forming apparatus
JP2005521215A (en) * 2002-03-21 2005-07-14 エルメス−マイクロビジョン・（タイワン）・インコーポレーテッド Electro-optical focusing, deflection, signal acquisition system and method for swinging objective decelerating immersion lens
US7473905B2 (en) 2005-10-04 2009-01-06 Jeol Ltd. Electrostatic deflector
EP4303907A1 (en) 2022-07-06 2024-01-10 Universität Hamburg Electrostatic deflector for charged particle optics

Also Published As

Publication number Publication date
JPH0353736B2 (en) 1991-08-16

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