JPS5325492A - Cylindrical mirror type analyzer for charged particles' energy - Google Patents

Cylindrical mirror type analyzer for charged particles' energy

Info

Publication number
JPS5325492A
JPS5325492A JP9971476A JP9971476A JPS5325492A JP S5325492 A JPS5325492 A JP S5325492A JP 9971476 A JP9971476 A JP 9971476A JP 9971476 A JP9971476 A JP 9971476A JP S5325492 A JPS5325492 A JP S5325492A
Authority
JP
Japan
Prior art keywords
mirror type
energy
cylindrical mirror
charged particles
type analyzer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9971476A
Other languages
Japanese (ja)
Inventor
Susumu Kawase
Kazunobu Hayakawa
Hiroshi Doi
Masakazu Ichikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9971476A priority Critical patent/JPS5325492A/en
Publication of JPS5325492A publication Critical patent/JPS5325492A/en
Pending legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

PURPOSE: To correct potential in cylindrical mirror type energy analyzer where central axis of two cylindrical electrodes are arranged coaxially, by attaching compensating electrode on flat partition board.
COPYRIGHT: (C)1978,JPO&Japio
JP9971476A 1976-08-23 1976-08-23 Cylindrical mirror type analyzer for charged particles' energy Pending JPS5325492A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9971476A JPS5325492A (en) 1976-08-23 1976-08-23 Cylindrical mirror type analyzer for charged particles' energy

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9971476A JPS5325492A (en) 1976-08-23 1976-08-23 Cylindrical mirror type analyzer for charged particles' energy

Publications (1)

Publication Number Publication Date
JPS5325492A true JPS5325492A (en) 1978-03-09

Family

ID=14254731

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9971476A Pending JPS5325492A (en) 1976-08-23 1976-08-23 Cylindrical mirror type analyzer for charged particles' energy

Country Status (1)

Country Link
JP (1) JPS5325492A (en)

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