JPS5334099A - Ion generator device - Google Patents

Ion generator device

Info

Publication number
JPS5334099A
JPS5334099A JP10726976A JP10726976A JPS5334099A JP S5334099 A JPS5334099 A JP S5334099A JP 10726976 A JP10726976 A JP 10726976A JP 10726976 A JP10726976 A JP 10726976A JP S5334099 A JPS5334099 A JP S5334099A
Authority
JP
Japan
Prior art keywords
ion generator
generator device
procure
cylindrically
well
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10726976A
Other languages
Japanese (ja)
Inventor
Yoshiro Shintani
Osamu Morimiya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP10726976A priority Critical patent/JPS5334099A/en
Publication of JPS5334099A publication Critical patent/JPS5334099A/en
Pending legal-status Critical Current

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  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE: To procure a uniform plasma density as well as excellent gas efficiency by arranging positive and negative electrodes in the direction of ion draw-out and forming this negative electrode cylindrically.
COPYRIGHT: (C)1978,JPO&Japio
JP10726976A 1976-09-09 1976-09-09 Ion generator device Pending JPS5334099A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10726976A JPS5334099A (en) 1976-09-09 1976-09-09 Ion generator device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10726976A JPS5334099A (en) 1976-09-09 1976-09-09 Ion generator device

Publications (1)

Publication Number Publication Date
JPS5334099A true JPS5334099A (en) 1978-03-30

Family

ID=14454766

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10726976A Pending JPS5334099A (en) 1976-09-09 1976-09-09 Ion generator device

Country Status (1)

Country Link
JP (1) JPS5334099A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01176633A (en) * 1987-12-30 1989-07-13 Tokyo Electron Ltd Electron beam-exciting ion source
JP2010044993A (en) * 2008-08-18 2010-02-25 Nissin Ion Equipment Co Ltd Hot cathode and ion source provided therewith

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01176633A (en) * 1987-12-30 1989-07-13 Tokyo Electron Ltd Electron beam-exciting ion source
JP2010044993A (en) * 2008-08-18 2010-02-25 Nissin Ion Equipment Co Ltd Hot cathode and ion source provided therewith

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