JPS51141998A - Multiple coaxial micro wave ion source - Google Patents

Multiple coaxial micro wave ion source

Info

Publication number
JPS51141998A
JPS51141998A JP6538875A JP6538875A JPS51141998A JP S51141998 A JPS51141998 A JP S51141998A JP 6538875 A JP6538875 A JP 6538875A JP 6538875 A JP6538875 A JP 6538875A JP S51141998 A JPS51141998 A JP S51141998A
Authority
JP
Japan
Prior art keywords
ion source
micro wave
multiple coaxial
wave ion
coaxial micro
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6538875A
Other languages
Japanese (ja)
Other versions
JPS598959B2 (en
Inventor
Katsumi Tokikuchi
Kuniyuki Sakumichi
Hideki Koike
Ichiro Shikamata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6538875A priority Critical patent/JPS598959B2/en
Publication of JPS51141998A publication Critical patent/JPS51141998A/en
Publication of JPS598959B2 publication Critical patent/JPS598959B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: Ion source in which uniform line beam can be drawn out in the most suitable efficiency, to each hole of pulling out electrode, by realization of genelgeneration of plasma in which saturated ion current is uniform.
COPYRIGHT: (C)1976,JPO&Japio
JP6538875A 1975-06-02 1975-06-02 Multiple coaxial microwave ion source Expired JPS598959B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6538875A JPS598959B2 (en) 1975-06-02 1975-06-02 Multiple coaxial microwave ion source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6538875A JPS598959B2 (en) 1975-06-02 1975-06-02 Multiple coaxial microwave ion source

Publications (2)

Publication Number Publication Date
JPS51141998A true JPS51141998A (en) 1976-12-07
JPS598959B2 JPS598959B2 (en) 1984-02-28

Family

ID=13285543

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6538875A Expired JPS598959B2 (en) 1975-06-02 1975-06-02 Multiple coaxial microwave ion source

Country Status (1)

Country Link
JP (1) JPS598959B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56128600A (en) * 1980-02-13 1981-10-08 Commissariat Energie Atomique Method and device for producing large ion highly charged and utility using same method
JPS62229641A (en) * 1986-03-13 1987-10-08 コミツサリア　タ　レネルジ−　アトミ−ク Electron cyclotron resonance ion source

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56128600A (en) * 1980-02-13 1981-10-08 Commissariat Energie Atomique Method and device for producing large ion highly charged and utility using same method
JPH0341934B2 (en) * 1980-02-13 1991-06-25
JPS62229641A (en) * 1986-03-13 1987-10-08 コミツサリア　タ　レネルジ−　アトミ−ク Electron cyclotron resonance ion source

Also Published As

Publication number Publication date
JPS598959B2 (en) 1984-02-28

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