JPS5244155A - Microwave ion source for paper-strip type beam - Google Patents
Microwave ion source for paper-strip type beamInfo
- Publication number
- JPS5244155A JPS5244155A JP50119738A JP11973875A JPS5244155A JP S5244155 A JPS5244155 A JP S5244155A JP 50119738 A JP50119738 A JP 50119738A JP 11973875 A JP11973875 A JP 11973875A JP S5244155 A JPS5244155 A JP S5244155A
- Authority
- JP
- Japan
- Prior art keywords
- ion source
- paper
- microwave ion
- type beam
- strip type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Particle Accelerators (AREA)
- Electron Sources, Ion Sources (AREA)
- Electron Tubes For Measurement (AREA)
Abstract
PURPOSE: As for the structure of the discharge room of microwave ion source, the portion except ridge-type electrode is made into a column shape. As a result, a simple structure as well as improved cooling effect can be ensured.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50119738A JPS5836455B2 (en) | 1975-10-06 | 1975-10-06 | tanzak bee microhyeongen |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50119738A JPS5836455B2 (en) | 1975-10-06 | 1975-10-06 | tanzak bee microhyeongen |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5244155A true JPS5244155A (en) | 1977-04-06 |
JPS5836455B2 JPS5836455B2 (en) | 1983-08-09 |
Family
ID=14768893
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50119738A Expired JPS5836455B2 (en) | 1975-10-06 | 1975-10-06 | tanzak bee microhyeongen |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5836455B2 (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5658541A (en) * | 1979-10-05 | 1981-05-21 | Personal Products Co | Flexible absorbing board |
JPS5836300A (en) * | 1981-08-03 | 1983-03-03 | パ−ソナル・プロダクツ・カンパニ− | Stable absorbing board |
JPS63147459A (en) * | 1986-12-11 | 1988-06-20 | 昭和電工株式会社 | Absorbing body |
US5569231A (en) * | 1994-03-01 | 1996-10-29 | The Procter & Gamble Company | Trisection sanitary napkin |
US6927148B2 (en) | 2002-07-15 | 2005-08-09 | Applied Materials, Inc. | Ion implantation method and method for manufacturing SOI wafer |
US7064049B2 (en) | 2002-07-31 | 2006-06-20 | Applied Materials, Inv. | Ion implantation method, SOI wafer manufacturing method and ion implantation system |
-
1975
- 1975-10-06 JP JP50119738A patent/JPS5836455B2/en not_active Expired
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5658541A (en) * | 1979-10-05 | 1981-05-21 | Personal Products Co | Flexible absorbing board |
JPH0218857B2 (en) * | 1979-10-05 | 1990-04-26 | Personal Products Co | |
JPS5836300A (en) * | 1981-08-03 | 1983-03-03 | パ−ソナル・プロダクツ・カンパニ− | Stable absorbing board |
JPH0366440B2 (en) * | 1981-08-03 | 1991-10-17 | Personal Products Co | |
JPS63147459A (en) * | 1986-12-11 | 1988-06-20 | 昭和電工株式会社 | Absorbing body |
US5569231A (en) * | 1994-03-01 | 1996-10-29 | The Procter & Gamble Company | Trisection sanitary napkin |
US6927148B2 (en) | 2002-07-15 | 2005-08-09 | Applied Materials, Inc. | Ion implantation method and method for manufacturing SOI wafer |
US7064049B2 (en) | 2002-07-31 | 2006-06-20 | Applied Materials, Inv. | Ion implantation method, SOI wafer manufacturing method and ion implantation system |
Also Published As
Publication number | Publication date |
---|---|
JPS5836455B2 (en) | 1983-08-09 |
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