JPS5385149A - Ion source - Google Patents

Ion source

Info

Publication number
JPS5385149A
JPS5385149A JP3877A JP3877A JPS5385149A JP S5385149 A JPS5385149 A JP S5385149A JP 3877 A JP3877 A JP 3877A JP 3877 A JP3877 A JP 3877A JP S5385149 A JPS5385149 A JP S5385149A
Authority
JP
Japan
Prior art keywords
ion source
ion beam
discharge room
increment
filament
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3877A
Other languages
Japanese (ja)
Inventor
Sumio Hosaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3877A priority Critical patent/JPS5385149A/en
Publication of JPS5385149A publication Critical patent/JPS5385149A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Particle Accelerators (AREA)

Abstract

PURPOSE: To obtain more uniform ion beam by providing a sub-discharge room in the discharge room of the ion source and preventing the increment of power consumption of filament in order to lead out ion beam of a large diameter.
COPYRIGHT: (C)1978,JPO&Japio
JP3877A 1977-01-05 1977-01-05 Ion source Pending JPS5385149A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3877A JPS5385149A (en) 1977-01-05 1977-01-05 Ion source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3877A JPS5385149A (en) 1977-01-05 1977-01-05 Ion source

Publications (1)

Publication Number Publication Date
JPS5385149A true JPS5385149A (en) 1978-07-27

Family

ID=11463144

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3877A Pending JPS5385149A (en) 1977-01-05 1977-01-05 Ion source

Country Status (1)

Country Link
JP (1) JPS5385149A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002140997A (en) * 2000-11-02 2002-05-17 Nissin Electric Co Ltd Ion source

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002140997A (en) * 2000-11-02 2002-05-17 Nissin Electric Co Ltd Ion source

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