JPS57197873A - Semiconductor pressure detector - Google Patents

Semiconductor pressure detector

Info

Publication number
JPS57197873A
JPS57197873A JP56080965A JP8096581A JPS57197873A JP S57197873 A JPS57197873 A JP S57197873A JP 56080965 A JP56080965 A JP 56080965A JP 8096581 A JP8096581 A JP 8096581A JP S57197873 A JPS57197873 A JP S57197873A
Authority
JP
Japan
Prior art keywords
gage
pressure detector
semiconductor pressure
conduction type
thin section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56080965A
Other languages
English (en)
Japanese (ja)
Other versions
JPH036674B2 (enrdf_load_stackoverflow
Inventor
Michitaka Shimazoe
Yukio Takahashi
Yoshitaka Matsuoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP56080965A priority Critical patent/JPS57197873A/ja
Publication of JPS57197873A publication Critical patent/JPS57197873A/ja
Publication of JPH036674B2 publication Critical patent/JPH036674B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP56080965A 1981-05-29 1981-05-29 Semiconductor pressure detector Granted JPS57197873A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56080965A JPS57197873A (en) 1981-05-29 1981-05-29 Semiconductor pressure detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56080965A JPS57197873A (en) 1981-05-29 1981-05-29 Semiconductor pressure detector

Publications (2)

Publication Number Publication Date
JPS57197873A true JPS57197873A (en) 1982-12-04
JPH036674B2 JPH036674B2 (enrdf_load_stackoverflow) 1991-01-30

Family

ID=13733222

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56080965A Granted JPS57197873A (en) 1981-05-29 1981-05-29 Semiconductor pressure detector

Country Status (1)

Country Link
JP (1) JPS57197873A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6189137U (enrdf_load_stackoverflow) * 1984-11-16 1986-06-10
JPH0465644A (ja) * 1990-07-05 1992-03-02 Mitsubishi Electric Corp 圧力センサ
JPH0476956A (ja) * 1990-07-19 1992-03-11 Mitsubishi Electric Corp 半導体加速度センサの製造方法
JPH0476959A (ja) * 1990-07-19 1992-03-11 Mitsubishi Electric Corp 半導体圧力センサの製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5367478A (en) * 1976-11-29 1978-06-15 Hitachi Ltd Pressure detector

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5367478A (en) * 1976-11-29 1978-06-15 Hitachi Ltd Pressure detector

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6189137U (enrdf_load_stackoverflow) * 1984-11-16 1986-06-10
JPH0465644A (ja) * 1990-07-05 1992-03-02 Mitsubishi Electric Corp 圧力センサ
JPH0476956A (ja) * 1990-07-19 1992-03-11 Mitsubishi Electric Corp 半導体加速度センサの製造方法
JPH0476959A (ja) * 1990-07-19 1992-03-11 Mitsubishi Electric Corp 半導体圧力センサの製造方法

Also Published As

Publication number Publication date
JPH036674B2 (enrdf_load_stackoverflow) 1991-01-30

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