JPS6189137U - - Google Patents

Info

Publication number
JPS6189137U
JPS6189137U JP17407484U JP17407484U JPS6189137U JP S6189137 U JPS6189137 U JP S6189137U JP 17407484 U JP17407484 U JP 17407484U JP 17407484 U JP17407484 U JP 17407484U JP S6189137 U JPS6189137 U JP S6189137U
Authority
JP
Japan
Prior art keywords
pressure sensor
metal
semiconductor pressure
silicon
coefficient
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17407484U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17407484U priority Critical patent/JPS6189137U/ja
Publication of JPS6189137U publication Critical patent/JPS6189137U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP17407484U 1984-11-16 1984-11-16 Pending JPS6189137U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17407484U JPS6189137U (enrdf_load_stackoverflow) 1984-11-16 1984-11-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17407484U JPS6189137U (enrdf_load_stackoverflow) 1984-11-16 1984-11-16

Publications (1)

Publication Number Publication Date
JPS6189137U true JPS6189137U (enrdf_load_stackoverflow) 1986-06-10

Family

ID=30731704

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17407484U Pending JPS6189137U (enrdf_load_stackoverflow) 1984-11-16 1984-11-16

Country Status (1)

Country Link
JP (1) JPS6189137U (enrdf_load_stackoverflow)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57186373A (en) * 1981-05-12 1982-11-16 Fuji Electric Corp Res & Dev Ltd Semiconductor pressure sensor
JPS57197873A (en) * 1981-05-29 1982-12-04 Hitachi Ltd Semiconductor pressure detector
JPS58221135A (ja) * 1982-06-18 1983-12-22 Hitachi Ltd シリコンダイアフラム形圧力センサ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57186373A (en) * 1981-05-12 1982-11-16 Fuji Electric Corp Res & Dev Ltd Semiconductor pressure sensor
JPS57197873A (en) * 1981-05-29 1982-12-04 Hitachi Ltd Semiconductor pressure detector
JPS58221135A (ja) * 1982-06-18 1983-12-22 Hitachi Ltd シリコンダイアフラム形圧力センサ

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