JPS57196795A - Manufacturing apparatus for beltlike silicon crystal - Google Patents

Manufacturing apparatus for beltlike silicon crystal

Info

Publication number
JPS57196795A
JPS57196795A JP8013181A JP8013181A JPS57196795A JP S57196795 A JPS57196795 A JP S57196795A JP 8013181 A JP8013181 A JP 8013181A JP 8013181 A JP8013181 A JP 8013181A JP S57196795 A JPS57196795 A JP S57196795A
Authority
JP
Japan
Prior art keywords
melt
crystal
die
sic
beltlike
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8013181A
Other languages
English (en)
Other versions
JPS5914434B2 (ja
Inventor
Koji Nakagawa
Masanaru Abe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP8013181A priority Critical patent/JPS5914434B2/ja
Publication of JPS57196795A publication Critical patent/JPS57196795A/ja
Publication of JPS5914434B2 publication Critical patent/JPS5914434B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP8013181A 1981-05-28 1981-05-28 帯状シリコン結晶の製造装置 Expired JPS5914434B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8013181A JPS5914434B2 (ja) 1981-05-28 1981-05-28 帯状シリコン結晶の製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8013181A JPS5914434B2 (ja) 1981-05-28 1981-05-28 帯状シリコン結晶の製造装置

Publications (2)

Publication Number Publication Date
JPS57196795A true JPS57196795A (en) 1982-12-02
JPS5914434B2 JPS5914434B2 (ja) 1984-04-04

Family

ID=13709670

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8013181A Expired JPS5914434B2 (ja) 1981-05-28 1981-05-28 帯状シリコン結晶の製造装置

Country Status (1)

Country Link
JP (1) JPS5914434B2 (ja)

Also Published As

Publication number Publication date
JPS5914434B2 (ja) 1984-04-04

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