JPS57196261A - Electrophotographic photoreceptor - Google Patents
Electrophotographic photoreceptorInfo
- Publication number
- JPS57196261A JPS57196261A JP8074381A JP8074381A JPS57196261A JP S57196261 A JPS57196261 A JP S57196261A JP 8074381 A JP8074381 A JP 8074381A JP 8074381 A JP8074381 A JP 8074381A JP S57196261 A JPS57196261 A JP S57196261A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- reaction vessel
- gas
- gas bomb
- base material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
- G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
- G03G5/02—Charge-receiving layers
- G03G5/04—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
- G03G5/08—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic
- G03G5/082—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic and not being incorporated in a bonding material, e.g. vacuum deposited
Landscapes
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Photoreceptors In Electrophotography (AREA)
- Silicon Compounds (AREA)
Abstract
PURPOSE:To enhance the spectral sensitivity and the durability, by vapor-depositing a photoconductive layer, where a specific quantity of doping materials is added to the essential component of microcrystalline silicon, on a conductive supporting material in vacuum and providing a protection layer on this photoconductive layer. CONSTITUTION:A drum base material 11 consisting of Al is put on a supporting table 12 in a reaction vessel 10, and a heater 17 and a work coil 9 are heated with a high frequency to make the inside of the reaction vessel vacuous. Compounding quantities of gaseous SiH4 in a gas bomb 1 which becomes raw materials of Si and B2H6 in a gas bomb 2 and O2, N2, etc. in a gas bomb 3 which become doping raw materials are determined on a basis of the quality design, and flow rates are controlled by valves to introduce them into the reaction vessel through a gas mixer. This gas is decomposed by the glow discharge to form a microcrystalline silicon layer 22 on a substrate 21 of the rotating drum base material 11. A protection layer 23 is provided on the layer 22, thus obtaining an electrophotographic photoreceptor.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8074381A JPS57196261A (en) | 1981-05-29 | 1981-05-29 | Electrophotographic photoreceptor |
| US06/382,285 US4560634A (en) | 1981-05-29 | 1982-05-26 | Electrophotographic photosensitive member using microcrystalline silicon |
| DE8282104724T DE3279006D1 (en) | 1981-05-29 | 1982-05-28 | Electrophotographic photosensitive member |
| EP82104724A EP0066812B1 (en) | 1981-05-29 | 1982-05-28 | Electrophotographic photosensitive member |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8074381A JPS57196261A (en) | 1981-05-29 | 1981-05-29 | Electrophotographic photoreceptor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57196261A true JPS57196261A (en) | 1982-12-02 |
| JPH0241743B2 JPH0241743B2 (en) | 1990-09-19 |
Family
ID=13726874
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8074381A Granted JPS57196261A (en) | 1981-05-29 | 1981-05-29 | Electrophotographic photoreceptor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57196261A (en) |
-
1981
- 1981-05-29 JP JP8074381A patent/JPS57196261A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0241743B2 (en) | 1990-09-19 |
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