JPS57192258A - Film forming apparatus using glow discharge - Google Patents

Film forming apparatus using glow discharge

Info

Publication number
JPS57192258A
JPS57192258A JP7419681A JP7419681A JPS57192258A JP S57192258 A JPS57192258 A JP S57192258A JP 7419681 A JP7419681 A JP 7419681A JP 7419681 A JP7419681 A JP 7419681A JP S57192258 A JPS57192258 A JP S57192258A
Authority
JP
Japan
Prior art keywords
base plate
gas
rotated
glow discharge
electrically conductive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7419681A
Other languages
English (en)
Japanese (ja)
Other versions
JPS616151B2 (enExample
Inventor
Satoru Nishikawa
Akira Uchiyama
Masahiro Akiyama
Katsuzo Uenishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP7419681A priority Critical patent/JPS57192258A/ja
Publication of JPS57192258A publication Critical patent/JPS57192258A/ja
Publication of JPS616151B2 publication Critical patent/JPS616151B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
    • C23C16/509—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Photoreceptors In Electrophotography (AREA)
JP7419681A 1981-05-19 1981-05-19 Film forming apparatus using glow discharge Granted JPS57192258A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7419681A JPS57192258A (en) 1981-05-19 1981-05-19 Film forming apparatus using glow discharge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7419681A JPS57192258A (en) 1981-05-19 1981-05-19 Film forming apparatus using glow discharge

Publications (2)

Publication Number Publication Date
JPS57192258A true JPS57192258A (en) 1982-11-26
JPS616151B2 JPS616151B2 (enExample) 1986-02-24

Family

ID=13540180

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7419681A Granted JPS57192258A (en) 1981-05-19 1981-05-19 Film forming apparatus using glow discharge

Country Status (1)

Country Link
JP (1) JPS57192258A (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59217615A (ja) * 1983-05-23 1984-12-07 Toshiba Corp アモルフアスシリコン成膜装置
JPS609876A (ja) * 1983-06-29 1985-01-18 Matsushita Electric Ind Co Ltd 薄膜製造装置
JPS6086276A (ja) * 1983-10-17 1985-05-15 Canon Inc 放電による堆積膜の形成方法
JPS6126780A (ja) * 1984-07-17 1986-02-06 Stanley Electric Co Ltd プラズマｃｖｄ装置
JPH07261437A (ja) * 1995-01-24 1995-10-13 Canon Inc 堆積膜の形成方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08138559A (ja) 1994-11-11 1996-05-31 Hitachi Ltd プラズマディスプレイ装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59217615A (ja) * 1983-05-23 1984-12-07 Toshiba Corp アモルフアスシリコン成膜装置
JPS609876A (ja) * 1983-06-29 1985-01-18 Matsushita Electric Ind Co Ltd 薄膜製造装置
JPS6086276A (ja) * 1983-10-17 1985-05-15 Canon Inc 放電による堆積膜の形成方法
JPS6126780A (ja) * 1984-07-17 1986-02-06 Stanley Electric Co Ltd プラズマｃｖｄ装置
JPH07261437A (ja) * 1995-01-24 1995-10-13 Canon Inc 堆積膜の形成方法

Also Published As

Publication number Publication date
JPS616151B2 (enExample) 1986-02-24

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