JPS57192048A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS57192048A
JPS57192048A JP7744381A JP7744381A JPS57192048A JP S57192048 A JPS57192048 A JP S57192048A JP 7744381 A JP7744381 A JP 7744381A JP 7744381 A JP7744381 A JP 7744381A JP S57192048 A JPS57192048 A JP S57192048A
Authority
JP
Japan
Prior art keywords
layer
film
hole
concave
concave part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7744381A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6355784B2 (enrdf_load_stackoverflow
Inventor
Toshiyuki Ishida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP7744381A priority Critical patent/JPS57192048A/ja
Publication of JPS57192048A publication Critical patent/JPS57192048A/ja
Publication of JPS6355784B2 publication Critical patent/JPS6355784B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP7744381A 1981-05-21 1981-05-21 Manufacture of semiconductor device Granted JPS57192048A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7744381A JPS57192048A (en) 1981-05-21 1981-05-21 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7744381A JPS57192048A (en) 1981-05-21 1981-05-21 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS57192048A true JPS57192048A (en) 1982-11-26
JPS6355784B2 JPS6355784B2 (enrdf_load_stackoverflow) 1988-11-04

Family

ID=13634158

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7744381A Granted JPS57192048A (en) 1981-05-21 1981-05-21 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS57192048A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59163838A (ja) * 1983-03-09 1984-09-14 Toshiba Corp 半導体装置の製造方法
JPH02153530A (ja) * 1988-12-05 1990-06-13 Mitsubishi Electric Corp 半導体装置の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59163838A (ja) * 1983-03-09 1984-09-14 Toshiba Corp 半導体装置の製造方法
JPH02153530A (ja) * 1988-12-05 1990-06-13 Mitsubishi Electric Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS6355784B2 (enrdf_load_stackoverflow) 1988-11-04

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