JPS57190348A - Manufacture of bipolar semiconductor device - Google Patents

Manufacture of bipolar semiconductor device

Info

Publication number
JPS57190348A
JPS57190348A JP56075185A JP7518581A JPS57190348A JP S57190348 A JPS57190348 A JP S57190348A JP 56075185 A JP56075185 A JP 56075185A JP 7518581 A JP7518581 A JP 7518581A JP S57190348 A JPS57190348 A JP S57190348A
Authority
JP
Japan
Prior art keywords
layer
type
sides
sio2
films
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56075185A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6242395B2 (enExample
Inventor
Shuichi Kameyama
Koichi Kanzaki
Yoshitaka Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP56075185A priority Critical patent/JPS57190348A/ja
Priority to US06/378,480 priority patent/US4433470A/en
Publication of JPS57190348A publication Critical patent/JPS57190348A/ja
Publication of JPS6242395B2 publication Critical patent/JPS6242395B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W10/0121—
    • H10P32/1414—
    • H10P32/171—
    • H10P76/40—
    • H10W10/13—
    • H10W20/021—

Landscapes

  • Bipolar Transistors (AREA)
  • Bipolar Integrated Circuits (AREA)
JP56075185A 1981-05-19 1981-05-19 Manufacture of bipolar semiconductor device Granted JPS57190348A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP56075185A JPS57190348A (en) 1981-05-19 1981-05-19 Manufacture of bipolar semiconductor device
US06/378,480 US4433470A (en) 1981-05-19 1982-05-14 Method for manufacturing semiconductor device utilizing selective etching and diffusion

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56075185A JPS57190348A (en) 1981-05-19 1981-05-19 Manufacture of bipolar semiconductor device

Publications (2)

Publication Number Publication Date
JPS57190348A true JPS57190348A (en) 1982-11-22
JPS6242395B2 JPS6242395B2 (enExample) 1987-09-08

Family

ID=13568886

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56075185A Granted JPS57190348A (en) 1981-05-19 1981-05-19 Manufacture of bipolar semiconductor device

Country Status (1)

Country Link
JP (1) JPS57190348A (enExample)

Also Published As

Publication number Publication date
JPS6242395B2 (enExample) 1987-09-08

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