JPS57189003A - Detector for deviation of optical path - Google Patents

Detector for deviation of optical path

Info

Publication number
JPS57189003A
JPS57189003A JP7442981A JP7442981A JPS57189003A JP S57189003 A JPS57189003 A JP S57189003A JP 7442981 A JP7442981 A JP 7442981A JP 7442981 A JP7442981 A JP 7442981A JP S57189003 A JPS57189003 A JP S57189003A
Authority
JP
Japan
Prior art keywords
branched
detected
deviations
fluxes
light spot
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7442981A
Other languages
Japanese (ja)
Inventor
Koji Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP7442981A priority Critical patent/JPS57189003A/en
Publication of JPS57189003A publication Critical patent/JPS57189003A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes

Abstract

PURPOSE:To separate and detect the presence or absence of the position deviations and angle devications of an optical path by providing two beam splitters which are disposed in parallel, two two-dimensional light spot position detecting elements that receive the branched beams from the beam spliters, and a signal processing part that processes the position signals from both detecting elements. CONSTITUTION:Parallel beam fluxes are partly branched with a beam splitter 1, and the branched light is detected with a two-dimensional light spot position detecting element 2. The light transmitted through the splitter 1 is partly branched with a beam splitter 3 and the branched light is detected with a two- dimensional light spot position detecting element 4. The position signals of the luminous fluxes detected with the elements 3, 4 are applied to a signal processing part 5, by which the presence or absence of the axial deviations of the parallel beam fluxes in their X and Y directions as well as the angle deviations in their horizontal and vertical directions is detected separately.
JP7442981A 1981-05-18 1981-05-18 Detector for deviation of optical path Pending JPS57189003A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7442981A JPS57189003A (en) 1981-05-18 1981-05-18 Detector for deviation of optical path

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7442981A JPS57189003A (en) 1981-05-18 1981-05-18 Detector for deviation of optical path

Publications (1)

Publication Number Publication Date
JPS57189003A true JPS57189003A (en) 1982-11-20

Family

ID=13546952

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7442981A Pending JPS57189003A (en) 1981-05-18 1981-05-18 Detector for deviation of optical path

Country Status (1)

Country Link
JP (1) JPS57189003A (en)

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