JPS5557826A - Optical scanning position detector - Google Patents

Optical scanning position detector

Info

Publication number
JPS5557826A
JPS5557826A JP13073178A JP13073178A JPS5557826A JP S5557826 A JPS5557826 A JP S5557826A JP 13073178 A JP13073178 A JP 13073178A JP 13073178 A JP13073178 A JP 13073178A JP S5557826 A JPS5557826 A JP S5557826A
Authority
JP
Japan
Prior art keywords
grating
scanning
inter
plates
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13073178A
Other languages
Japanese (ja)
Inventor
Masahito Nakajima
Katsumi Fujiwara
Taku Yoshida
Masayuki Oyama
Kikuo Mita
Tadao Nakakuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP13073178A priority Critical patent/JPS5557826A/en
Publication of JPS5557826A publication Critical patent/JPS5557826A/en
Pending legal-status Critical Current

Links

Landscapes

  • Mechanical Optical Scanning Systems (AREA)
  • Facsimile Scanning Arrangements (AREA)

Abstract

PURPOSE: To enable the grating plates of a sufficiently large inter-grating spacing to be utilized and perform scanning position detection of high accuracy by the constitution comprising splitting a scanning beam for measurement to a plurality, deviating the mutual grating positions of the grating plates being scanned by each scanning light and combining the detection signals by the respective grating plates later.
CONSTITUTION: A beam splitter 11 is provided to the optical path of scanning light 4 scanning the plane to be scanned 5 and is so arranged that reflection takes place on both front and back surfaces thereto to provide two branched beams 81, 82. Photo detectors α, β are disposed behind the grating plates A, B which are scanned by two pieces of these scanning beams 81, 82 for measurement. Here, the inter-grating spacing D of the respective grating plates A, B is taken sufficiently larger than the spot diameters of the scanning beams 81, 82 and the gratings of the grating plates A and B are deviated with each other by 1/2 the inter-grating spacing D. Such constitution eventually results in the same thing that measurement is done by the grating plates having the inter-grating spacing of D/2, thus the measurement accuracy becomes twice higher.
COPYRIGHT: (C)1980,JPO&Japio
JP13073178A 1978-10-24 1978-10-24 Optical scanning position detector Pending JPS5557826A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13073178A JPS5557826A (en) 1978-10-24 1978-10-24 Optical scanning position detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13073178A JPS5557826A (en) 1978-10-24 1978-10-24 Optical scanning position detector

Publications (1)

Publication Number Publication Date
JPS5557826A true JPS5557826A (en) 1980-04-30

Family

ID=15041277

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13073178A Pending JPS5557826A (en) 1978-10-24 1978-10-24 Optical scanning position detector

Country Status (1)

Country Link
JP (1) JPS5557826A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59155825A (en) * 1983-01-31 1984-09-05 セミア　エレクトロニクス　ア−ベ− Scanner
JPS62210416A (en) * 1986-03-12 1987-09-16 Horiba Ltd Scanning position detecting device for optical scanning system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59155825A (en) * 1983-01-31 1984-09-05 セミア　エレクトロニクス　ア−ベ− Scanner
JPS62210416A (en) * 1986-03-12 1987-09-16 Horiba Ltd Scanning position detecting device for optical scanning system

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