JPS54118891A - Surface deffct inspecting device - Google Patents

Surface deffct inspecting device

Info

Publication number
JPS54118891A
JPS54118891A JP2617578A JP2617578A JPS54118891A JP S54118891 A JPS54118891 A JP S54118891A JP 2617578 A JP2617578 A JP 2617578A JP 2617578 A JP2617578 A JP 2617578A JP S54118891 A JPS54118891 A JP S54118891A
Authority
JP
Japan
Prior art keywords
transducers
laser beam
light
reflected
inspected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2617578A
Other languages
Japanese (ja)
Inventor
Nobuhiko Tsuji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP2617578A priority Critical patent/JPS54118891A/en
Publication of JPS54118891A publication Critical patent/JPS54118891A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To detect surface defect at high precision without using expensive optical device, by disposing plural photoelectric elements across the reflected diffracted light of coherent light such as laser beam. CONSTITUTION:Photoelectric transducers 31, 32 of array form are disposed opposedly across the principal relfected light of reflected light 10 of laser beam 8 entering the object being inspected 4. The length of transducers 31, 32 should be more than the width of object being inspected 4, and the transducers are located at equal distance from the point of reflection, being parallel to a scanning locus 9. The laser beam 8 emitted from a laser beam source 1 is reflected by a rotating mirror 2 and a stationary mirror 3 to enter the surface 4a of the object being inspected, and draws a scanning locus 9 due to the rotation of the rotating mirror 2. The laser beam thus entering the surface is scattered and diffracted variously depending on the surface conditions, and its reflected light 10 contains the surface information. Since the transducers 31, 32 are disposed on both sides of the principal reflected light of the principal reflected light 10, only the light corresponding to the diffraction pattern 23 caused by flow or defect may be detected by the transducers 31, 32. The outputs of transducers 31, 32 are processed in a signal processing part 33, and flaw signal is outputted.
JP2617578A 1978-03-08 1978-03-08 Surface deffct inspecting device Pending JPS54118891A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2617578A JPS54118891A (en) 1978-03-08 1978-03-08 Surface deffct inspecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2617578A JPS54118891A (en) 1978-03-08 1978-03-08 Surface deffct inspecting device

Publications (1)

Publication Number Publication Date
JPS54118891A true JPS54118891A (en) 1979-09-14

Family

ID=12186190

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2617578A Pending JPS54118891A (en) 1978-03-08 1978-03-08 Surface deffct inspecting device

Country Status (1)

Country Link
JP (1) JPS54118891A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0123929A2 (en) * 1983-04-22 1984-11-07 Erwin Sick GmbH Optik-Elektronik Device for the detection of faults
EP0406030A2 (en) * 1989-06-30 1991-01-02 Qc Optics, Inc. Inspection apparatus and method for detecting flaws on a diffractive surface

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0123929A2 (en) * 1983-04-22 1984-11-07 Erwin Sick GmbH Optik-Elektronik Device for the detection of faults
EP0406030A2 (en) * 1989-06-30 1991-01-02 Qc Optics, Inc. Inspection apparatus and method for detecting flaws on a diffractive surface

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