JPS56141505A - Position detector - Google Patents

Position detector

Info

Publication number
JPS56141505A
JPS56141505A JP4438280A JP4438280A JPS56141505A JP S56141505 A JPS56141505 A JP S56141505A JP 4438280 A JP4438280 A JP 4438280A JP 4438280 A JP4438280 A JP 4438280A JP S56141505 A JPS56141505 A JP S56141505A
Authority
JP
Japan
Prior art keywords
light
target
reflected
transducer
deltax
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4438280A
Other languages
Japanese (ja)
Inventor
Hideto Iwaoka
Koji Akiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Hokushin Electric Corp
Yokogawa Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Hokushin Electric Corp, Yokogawa Electric Works Ltd filed Critical Yokogawa Hokushin Electric Corp
Priority to JP4438280A priority Critical patent/JPS56141505A/en
Publication of JPS56141505A publication Critical patent/JPS56141505A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)

Abstract

PURPOSE:To accurately detect the normal position of a target irrespective of the directivity of reflected light by allowing received light beams to two bisecting photoelectric transducers via a semitransparent mirror in a position detector of trigonometry. CONSTITUTION:The luminous flux from a light source LD forms a light spot P on the surface 4 of a target 3 via lenses L1, L2. The reflected scattering light from the light spot P passes through lenses L2, L3, is bisected by a semitransparent mirror HM, is focused at the point F3 of the forward DELTAx of a photoelectric transducer PD1 and enters a photoelectric transducer PD2 so as to converge at the point F'3 of backward DELTAx thereof. The outputs alpha, beta of A, B of the transducer PD1 and the outputs gamma, delta of C, D of the PD2 are inputted to an arithmetic cricuit PD1 and the which (alpha+delta)-(beta+gamma)=E0 is outputted. According to the positive, negative and 0 values of E0, whether the relative distance of the target 3 is further or nearer than the reference distance Zo or is equal thereto is decided and the normal position of the taget 3 is accurately detected irrespective of the directivity of the reflected scattering light.
JP4438280A 1980-04-04 1980-04-04 Position detector Pending JPS56141505A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4438280A JPS56141505A (en) 1980-04-04 1980-04-04 Position detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4438280A JPS56141505A (en) 1980-04-04 1980-04-04 Position detector

Publications (1)

Publication Number Publication Date
JPS56141505A true JPS56141505A (en) 1981-11-05

Family

ID=12689946

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4438280A Pending JPS56141505A (en) 1980-04-04 1980-04-04 Position detector

Country Status (1)

Country Link
JP (1) JPS56141505A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58168906A (en) * 1982-03-30 1983-10-05 Jeol Ltd Device for measuring surface height of object
FR2541001A1 (en) * 1983-02-15 1984-08-17 Gen Electric OPTICAL PROJECTOR FOR DETERMINING A POSITION AND METHOD FOR DETERMINING
JPS618808U (en) * 1984-06-22 1986-01-20 株式会社ミツトヨ Optical surface displacement detection device
WO1986001589A1 (en) * 1984-09-06 1986-03-13 Renishaw Plc Position sensing apparatus
US4623253A (en) * 1982-12-16 1986-11-18 Matsushita Electric Industrial Co., Ltd. Position detecting apparatus

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58168906A (en) * 1982-03-30 1983-10-05 Jeol Ltd Device for measuring surface height of object
JPH0474644B2 (en) * 1982-03-30 1992-11-26
US4623253A (en) * 1982-12-16 1986-11-18 Matsushita Electric Industrial Co., Ltd. Position detecting apparatus
FR2541001A1 (en) * 1983-02-15 1984-08-17 Gen Electric OPTICAL PROJECTOR FOR DETERMINING A POSITION AND METHOD FOR DETERMINING
JPS618808U (en) * 1984-06-22 1986-01-20 株式会社ミツトヨ Optical surface displacement detection device
WO1986001589A1 (en) * 1984-09-06 1986-03-13 Renishaw Plc Position sensing apparatus

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