JPS57188840A - Load variable mechanism in wire bonder - Google Patents
Load variable mechanism in wire bonderInfo
- Publication number
- JPS57188840A JPS57188840A JP56074028A JP7402881A JPS57188840A JP S57188840 A JPS57188840 A JP S57188840A JP 56074028 A JP56074028 A JP 56074028A JP 7402881 A JP7402881 A JP 7402881A JP S57188840 A JPS57188840 A JP S57188840A
- Authority
- JP
- Japan
- Prior art keywords
- load
- arm
- wire bonder
- driving
- bonding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/78—Apparatus for connecting with wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
- H01L2224/7825—Means for applying energy, e.g. heating means
- H01L2224/783—Means for applying energy, e.g. heating means by means of pressure
- H01L2224/78301—Capillary
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
- H01L2224/786—Means for supplying the connector to be connected in the bonding apparatus
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
- H01L2224/851—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector the connector being supplied to the parts to be connected in the bonding apparatus
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Wire Bonding (AREA)
Abstract
PURPOSE:To obtain the load variable mechanism in the wire bonder capable of setting the best bonding load at every bonding point by utilizing an electromagnetic magnet. CONSTITUTION:In a wire bonder mechanism having a bonding arm 11 holding a capillary 10, a clamping arm 24 holding a clamper 23, a driving arm 50 fixed to a driving block 17 and a motor 41 driving the driving arm 50 through a block 45, a contacting roller 33 is mounted to one end of a load arm 31 while being opposed to the upper surface of the bonding arm 11, and a movable plate 34 is set up to the other end. The electromagnetic magnet 35 is attached to a mounting block 30 while being opposed to the movable plate 34. Accordingly, the pressing force of the capillary 10 is load obtained by adding load by a spring 22 and load by the sucking force of the electromagnetic magnet 35 corresponding to voltage.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56074028A JPS57188840A (en) | 1981-05-15 | 1981-05-15 | Load variable mechanism in wire bonder |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56074028A JPS57188840A (en) | 1981-05-15 | 1981-05-15 | Load variable mechanism in wire bonder |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57188840A true JPS57188840A (en) | 1982-11-19 |
JPS6229897B2 JPS6229897B2 (en) | 1987-06-29 |
Family
ID=13535265
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56074028A Granted JPS57188840A (en) | 1981-05-15 | 1981-05-15 | Load variable mechanism in wire bonder |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57188840A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59130433A (en) * | 1983-01-17 | 1984-07-27 | Toshiba Corp | Wire bonding device |
JPS60117743A (en) * | 1983-11-30 | 1985-06-25 | Toshiba Corp | Method of judgement for junction state in wire bonding |
JPS60132333A (en) * | 1983-12-20 | 1985-07-15 | Matsushita Electric Ind Co Ltd | Wire bonding device |
JPH01175239A (en) * | 1987-11-19 | 1989-07-11 | Shinkawa Ltd | Bonding apparatus |
DE4016720B4 (en) * | 1989-08-11 | 2005-11-24 | Orthodyne Electronics Corp., Costa Mesa | Method and apparatus for ultrasonic bonding |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52124864A (en) * | 1976-04-13 | 1977-10-20 | Tokyo Sokuhan Kk | Wireebonder |
JPS54101667A (en) * | 1978-01-27 | 1979-08-10 | Hitachi Ltd | Wire bonding unit |
-
1981
- 1981-05-15 JP JP56074028A patent/JPS57188840A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52124864A (en) * | 1976-04-13 | 1977-10-20 | Tokyo Sokuhan Kk | Wireebonder |
JPS54101667A (en) * | 1978-01-27 | 1979-08-10 | Hitachi Ltd | Wire bonding unit |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59130433A (en) * | 1983-01-17 | 1984-07-27 | Toshiba Corp | Wire bonding device |
JPH0468776B2 (en) * | 1983-01-17 | 1992-11-04 | Tokyo Shibaura Electric Co | |
JPS60117743A (en) * | 1983-11-30 | 1985-06-25 | Toshiba Corp | Method of judgement for junction state in wire bonding |
JPS60132333A (en) * | 1983-12-20 | 1985-07-15 | Matsushita Electric Ind Co Ltd | Wire bonding device |
JPH01175239A (en) * | 1987-11-19 | 1989-07-11 | Shinkawa Ltd | Bonding apparatus |
DE4016720B4 (en) * | 1989-08-11 | 2005-11-24 | Orthodyne Electronics Corp., Costa Mesa | Method and apparatus for ultrasonic bonding |
Also Published As
Publication number | Publication date |
---|---|
JPS6229897B2 (en) | 1987-06-29 |
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