JPS6470734A - Z-theta fine adjustment table - Google Patents

Z-theta fine adjustment table

Info

Publication number
JPS6470734A
JPS6470734A JP62176298A JP17629887A JPS6470734A JP S6470734 A JPS6470734 A JP S6470734A JP 62176298 A JP62176298 A JP 62176298A JP 17629887 A JP17629887 A JP 17629887A JP S6470734 A JPS6470734 A JP S6470734A
Authority
JP
Japan
Prior art keywords
theta
electrostrictive element
holder
sample board
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62176298A
Other languages
Japanese (ja)
Inventor
Jiro Takamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP62176298A priority Critical patent/JPS6470734A/en
Publication of JPS6470734A publication Critical patent/JPS6470734A/en
Pending legal-status Critical Current

Links

Landscapes

  • Projection-Type Copiers In General (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Machine Tool Units (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE:To suppress the height of a test table and to improve accuracy by supporting a sample board holder on a substrate in such a way that it can be moved in an up-and-down direction and rotatably freely by a guide groove consisting of a holder and a hard ball. CONSTITUTION:When a voltage is applied on an electrostrictive element 9 for driving in a direction of Z, micro displacement is generated in the electrostrictive element 9, which deflects a flat spring protection mechanism 15 having elasticity in the direction of Z, and as a result, the sample board 1 is guided by a Z-theta direction guide mechanism 17 consisting of the holder 17b and the hard ball 17a, and displaces its position for the substrate 16, and realizes fine adjustment corresponding to an impressed voltage. Also, when the voltage is applied on an electrostrictive element 12 for driving in a direction of theta, a lever 10 connected to the electrostrictive element 12 is pushed and fed by a tension spring mounted between the lever 10 and a block 11, and the sample board holder 14 is guided by the guide mechanism 17, and is rotated in the direction of theta, then, the sample board 1 is finely adjusted in the direction of theta.
JP62176298A 1987-07-14 1987-07-14 Z-theta fine adjustment table Pending JPS6470734A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62176298A JPS6470734A (en) 1987-07-14 1987-07-14 Z-theta fine adjustment table

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62176298A JPS6470734A (en) 1987-07-14 1987-07-14 Z-theta fine adjustment table

Publications (1)

Publication Number Publication Date
JPS6470734A true JPS6470734A (en) 1989-03-16

Family

ID=16011138

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62176298A Pending JPS6470734A (en) 1987-07-14 1987-07-14 Z-theta fine adjustment table

Country Status (1)

Country Link
JP (1) JPS6470734A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000070597A1 (en) * 1999-05-12 2000-11-23 Koninklijke Philips Electronics N.V. White color selection for display on display device
JP2008192776A (en) * 2007-02-02 2008-08-21 Tokyo Electron Ltd Placing device
CN102087485A (en) * 2010-12-30 2011-06-08 中国科学院光电技术研究所 Micro-rotation mechanism for silicon wafer stage of projection photoetching machine
CN107696145A (en) * 2016-08-09 2018-02-16 中融飞腾（北京）科技有限公司 A kind of mold cutter high precision fine tuning device
CN108032096A (en) * 2017-12-20 2018-05-15 舒能数控机床有限公司 A kind of numerically controlled machine of stationarity higher

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000070597A1 (en) * 1999-05-12 2000-11-23 Koninklijke Philips Electronics N.V. White color selection for display on display device
US6657611B1 (en) 1999-05-12 2003-12-02 Koninklijke Philips Electronics N.V. White color selection of display information
JP2008192776A (en) * 2007-02-02 2008-08-21 Tokyo Electron Ltd Placing device
US8113084B2 (en) 2007-02-02 2012-02-14 Tokyo Electron Limited Mounting device
CN102087485A (en) * 2010-12-30 2011-06-08 中国科学院光电技术研究所 Micro-rotation mechanism for silicon wafer stage of projection photoetching machine
CN107696145A (en) * 2016-08-09 2018-02-16 中融飞腾（北京）科技有限公司 A kind of mold cutter high precision fine tuning device
CN108032096A (en) * 2017-12-20 2018-05-15 舒能数控机床有限公司 A kind of numerically controlled machine of stationarity higher

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