JPS57187852A - Observation method of magnetic sector construction using electron microscope - Google Patents

Observation method of magnetic sector construction using electron microscope

Info

Publication number
JPS57187852A
JPS57187852A JP7123681A JP7123681A JPS57187852A JP S57187852 A JPS57187852 A JP S57187852A JP 7123681 A JP7123681 A JP 7123681A JP 7123681 A JP7123681 A JP 7123681A JP S57187852 A JPS57187852 A JP S57187852A
Authority
JP
Japan
Prior art keywords
sample
magnetic
objective lens
lens
electrons
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7123681A
Other languages
English (en)
Inventor
Terukazu Eto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP7123681A priority Critical patent/JPS57187852A/ja
Publication of JPS57187852A publication Critical patent/JPS57187852A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/29—Reflection microscopes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP7123681A 1981-05-12 1981-05-12 Observation method of magnetic sector construction using electron microscope Pending JPS57187852A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7123681A JPS57187852A (en) 1981-05-12 1981-05-12 Observation method of magnetic sector construction using electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7123681A JPS57187852A (en) 1981-05-12 1981-05-12 Observation method of magnetic sector construction using electron microscope

Publications (1)

Publication Number Publication Date
JPS57187852A true JPS57187852A (en) 1982-11-18

Family

ID=13454851

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7123681A Pending JPS57187852A (en) 1981-05-12 1981-05-12 Observation method of magnetic sector construction using electron microscope

Country Status (1)

Country Link
JP (1) JPS57187852A (ja)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4917906A (ja) * 1972-06-06 1974-02-16
JPS4984361A (ja) * 1972-12-18 1974-08-13
JPS523377A (en) * 1975-06-24 1977-01-11 Jeol Ltd Magnetic section observing method and its device by scanning electroni c microscope
JPS5540921U (ja) * 1978-09-08 1980-03-15

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4917906A (ja) * 1972-06-06 1974-02-16
JPS4984361A (ja) * 1972-12-18 1974-08-13
JPS523377A (en) * 1975-06-24 1977-01-11 Jeol Ltd Magnetic section observing method and its device by scanning electroni c microscope
JPS5540921U (ja) * 1978-09-08 1980-03-15

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