JPS57184237A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS57184237A JPS57184237A JP6860582A JP6860582A JPS57184237A JP S57184237 A JPS57184237 A JP S57184237A JP 6860582 A JP6860582 A JP 6860582A JP 6860582 A JP6860582 A JP 6860582A JP S57184237 A JPS57184237 A JP S57184237A
- Authority
- JP
- Japan
- Prior art keywords
- wiring
- contact hole
- aluminum
- slit
- silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE:To prevent the accident of disconnection of wiring, and to obtain the wiring having high reliability and high yield by forming a contact hole connected to a metallic wiring layer, along the wiring longitudinal direction thereof a slit is shaped. CONSTITUTION:The aluminum wiring wider than 10mu width is formed within 30mu from the contact hole. When there is no silicon supply source which can sufficiently supply silicon to aluminum wiring in the vicinity of the contact hole, aluminum wiring 15' is connected to aluminum wiring 16' and a source region 8' through the contact hole 11', and the slit 17' is formed to the aluminum wiring 16'. Accordingly, the so-called punch-through can be prevented because the diffusion of silicon to the circumferential aluminum layer is inhibited by the slit.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6860582A JPS5833704B2 (en) | 1982-04-26 | 1982-04-26 | semiconductor equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6860582A JPS5833704B2 (en) | 1982-04-26 | 1982-04-26 | semiconductor equipment |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50086148A Division JPS5933979B2 (en) | 1975-07-16 | 1975-07-16 | semiconductor equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57184237A true JPS57184237A (en) | 1982-11-12 |
JPS5833704B2 JPS5833704B2 (en) | 1983-07-21 |
Family
ID=13378570
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6860582A Expired JPS5833704B2 (en) | 1982-04-26 | 1982-04-26 | semiconductor equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5833704B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018026451A (en) * | 2016-08-10 | 2018-02-15 | エスアイアイ・セミコンダクタ株式会社 | Semiconductor device |
-
1982
- 1982-04-26 JP JP6860582A patent/JPS5833704B2/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018026451A (en) * | 2016-08-10 | 2018-02-15 | エスアイアイ・セミコンダクタ株式会社 | Semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
JPS5833704B2 (en) | 1983-07-21 |
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