JPS57176818A - Manufacture of crystal oscillator - Google Patents
Manufacture of crystal oscillatorInfo
- Publication number
- JPS57176818A JPS57176818A JP6224781A JP6224781A JPS57176818A JP S57176818 A JPS57176818 A JP S57176818A JP 6224781 A JP6224781 A JP 6224781A JP 6224781 A JP6224781 A JP 6224781A JP S57176818 A JPS57176818 A JP S57176818A
- Authority
- JP
- Japan
- Prior art keywords
- resist
- crystal oscillator
- quartz substrate
- pattern
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013078 crystal Substances 0.000 title abstract 4
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000005530 etching Methods 0.000 abstract 4
- 239000010453 quartz Substances 0.000 abstract 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 4
- 239000000758 substrate Substances 0.000 abstract 4
- 239000011521 glass Substances 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 1
- 238000007747 plating Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6224781A JPS57176818A (en) | 1981-04-24 | 1981-04-24 | Manufacture of crystal oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6224781A JPS57176818A (en) | 1981-04-24 | 1981-04-24 | Manufacture of crystal oscillator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57176818A true JPS57176818A (en) | 1982-10-30 |
| JPH0147931B2 JPH0147931B2 (enrdf_load_stackoverflow) | 1989-10-17 |
Family
ID=13194613
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6224781A Granted JPS57176818A (en) | 1981-04-24 | 1981-04-24 | Manufacture of crystal oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57176818A (enrdf_load_stackoverflow) |
-
1981
- 1981-04-24 JP JP6224781A patent/JPS57176818A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0147931B2 (enrdf_load_stackoverflow) | 1989-10-17 |
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