JPS57175201A - Length measuring original device and blank for said device - Google Patents

Length measuring original device and blank for said device

Info

Publication number
JPS57175201A
JPS57175201A JP5968881A JP5968881A JPS57175201A JP S57175201 A JPS57175201 A JP S57175201A JP 5968881 A JP5968881 A JP 5968881A JP 5968881 A JP5968881 A JP 5968881A JP S57175201 A JPS57175201 A JP S57175201A
Authority
JP
Japan
Prior art keywords
measuring
stage
length measuring
length
blank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5968881A
Other languages
Japanese (ja)
Inventor
Natsuki Maruyama
Yukifumi Noro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hoya Corp
Hoya Electronics Corp
Original Assignee
Hoya Corp
Hoya Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoya Corp, Hoya Electronics Corp filed Critical Hoya Corp
Priority to JP5968881A priority Critical patent/JPS57175201A/en
Publication of JPS57175201A publication Critical patent/JPS57175201A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B3/00—Measuring instruments characterised by the use of mechanical techniques
    • G01B3/30—Bars, blocks, or strips in which the distance between a pair of faces is fixed, although it may be preadjustable, e.g. end measure, feeler strip
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B1/00—Measuring instruments characterised by the selection of material therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length-Measuring Instruments Using Mechanical Means (AREA)

Abstract

PURPOSE:To confirm the accurate working of a measuring device, by using a length measuring original device having a standard length measuring pattern formed on a substrate which has an extremely small linear expansion coefficient. CONSTITUTION:The blank for length measuring original device has a chromium film 2 formed on a glass substrate 1 having <=2X10<-7>/ deg.C (0-100 deg.C) linear expansion coefficient. The measuring original device is first put on a stage, and then the laser condensed at a microspot is irradiated at the measuring position 3. Then the scattered beams caused to the position 3 are caught to detect the position. Thereafter, the stage is moved to detect the measuring position 4 in the same way. The measurement of length is possible by obtaining the moving extent of the stage, and this operation is repeated several times to confirm the reproducibility of a measuring device. As a result, the accurate working can be confirmed for the measuring device.
JP5968881A 1981-04-22 1981-04-22 Length measuring original device and blank for said device Pending JPS57175201A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5968881A JPS57175201A (en) 1981-04-22 1981-04-22 Length measuring original device and blank for said device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5968881A JPS57175201A (en) 1981-04-22 1981-04-22 Length measuring original device and blank for said device

Publications (1)

Publication Number Publication Date
JPS57175201A true JPS57175201A (en) 1982-10-28

Family

ID=13120392

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5968881A Pending JPS57175201A (en) 1981-04-22 1981-04-22 Length measuring original device and blank for said device

Country Status (1)

Country Link
JP (1) JPS57175201A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002031524A (en) * 2000-07-18 2002-01-31 Toray Ind Inc Standard plate for calibrating length measuring instrument, method of calibration for instrumental error and method of manufacturing plasma display panel
DE19755608B4 (en) * 1997-12-15 2012-12-06 Volkswagen Ag Use of a device and method for calibrating a scale

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19755608B4 (en) * 1997-12-15 2012-12-06 Volkswagen Ag Use of a device and method for calibrating a scale
JP2002031524A (en) * 2000-07-18 2002-01-31 Toray Ind Inc Standard plate for calibrating length measuring instrument, method of calibration for instrumental error and method of manufacturing plasma display panel
JP4554778B2 (en) * 2000-07-18 2010-09-29 パナソニック株式会社 Machine difference verification method and plasma display panel manufacturing method

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