JPS6453145A - Method and device for evaluation in-surface anisotropy of thin film - Google Patents
Method and device for evaluation in-surface anisotropy of thin filmInfo
- Publication number
- JPS6453145A JPS6453145A JP9306188A JP9306188A JPS6453145A JP S6453145 A JPS6453145 A JP S6453145A JP 9306188 A JP9306188 A JP 9306188A JP 9306188 A JP9306188 A JP 9306188A JP S6453145 A JPS6453145 A JP S6453145A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- heat emissivity
- anisotropy
- direction perpendicular
- border
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
Abstract
PURPOSE:To apply the method and device generally and to evaluate the in- surface anisotropy speedily and easily by varying the direction of the linear border part between a light irradiated part and an unirradiated part of one surface of a thin film by a specific angle, and finding heat emissivity in a direction perpendicular to the thickness direction of the film. CONSTITUTION:Part of one surface of the thin film 1 which has constant thickness is covered with a mask member which has a linear edge, a semicircular chopper 3 is rotated to irradiate the light irradiated part intermittently with light from a light source 4, and the edge is moved by a micrometer 5 to measure the AC temperature at points at various distances from the border of the unirradiated part by a thermocouple 6, thereby finding the heat emissivity in the direction perpendicular to the border line. The difference in the heat emissivity corresponds to the in-surface anisotropy, so the anisotropy of the thin film is evaluated speedily and easily by making the in-surface linear direction perpendicular to the thickness direction of the film 1 different. Further, this heat emissivity measurement is applicable to general thin film materials, so versatility is obtained.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9306188A JPS6453145A (en) | 1987-05-09 | 1988-04-15 | Method and device for evaluation in-surface anisotropy of thin film |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11285787 | 1987-05-09 | ||
JP9306188A JPS6453145A (en) | 1987-05-09 | 1988-04-15 | Method and device for evaluation in-surface anisotropy of thin film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6453145A true JPS6453145A (en) | 1989-03-01 |
Family
ID=26434507
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9306188A Pending JPS6453145A (en) | 1987-05-09 | 1988-04-15 | Method and device for evaluation in-surface anisotropy of thin film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6453145A (en) |
-
1988
- 1988-04-15 JP JP9306188A patent/JPS6453145A/en active Pending
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