JPS57170526A - Exposing method and device for charged beam - Google Patents

Exposing method and device for charged beam

Info

Publication number
JPS57170526A
JPS57170526A JP5507081A JP5507081A JPS57170526A JP S57170526 A JPS57170526 A JP S57170526A JP 5507081 A JP5507081 A JP 5507081A JP 5507081 A JP5507081 A JP 5507081A JP S57170526 A JPS57170526 A JP S57170526A
Authority
JP
Japan
Prior art keywords
substrate
resist
charged beam
exposed
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5507081A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6320375B2 (enrdf_load_stackoverflow
Inventor
Kenichi Kawashima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP5507081A priority Critical patent/JPS57170526A/ja
Publication of JPS57170526A publication Critical patent/JPS57170526A/ja
Publication of JPS6320375B2 publication Critical patent/JPS6320375B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electron Beam Exposure (AREA)
JP5507081A 1981-04-14 1981-04-14 Exposing method and device for charged beam Granted JPS57170526A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5507081A JPS57170526A (en) 1981-04-14 1981-04-14 Exposing method and device for charged beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5507081A JPS57170526A (en) 1981-04-14 1981-04-14 Exposing method and device for charged beam

Publications (2)

Publication Number Publication Date
JPS57170526A true JPS57170526A (en) 1982-10-20
JPS6320375B2 JPS6320375B2 (enrdf_load_stackoverflow) 1988-04-27

Family

ID=12988429

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5507081A Granted JPS57170526A (en) 1981-04-14 1981-04-14 Exposing method and device for charged beam

Country Status (1)

Country Link
JP (1) JPS57170526A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61125019A (ja) * 1984-11-16 1986-06-12 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション 集積回路製造方法及びその方法に使用する光導電性フオトレジスト複合体
US5994007A (en) * 1997-12-19 1999-11-30 Kabushiki Kaisha Toshiba Pattern forming method utilizing first insulative and then conductive overlayer and underlayer
US6507029B1 (en) 1998-03-25 2003-01-14 Hitachi, Ltd. Sample processing apparatus and method for removing charge on sample through light irradiation

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55138232A (en) * 1979-04-12 1980-10-28 Chiyou Lsi Gijutsu Kenkyu Kumiai Drawing device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55138232A (en) * 1979-04-12 1980-10-28 Chiyou Lsi Gijutsu Kenkyu Kumiai Drawing device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61125019A (ja) * 1984-11-16 1986-06-12 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション 集積回路製造方法及びその方法に使用する光導電性フオトレジスト複合体
US5994007A (en) * 1997-12-19 1999-11-30 Kabushiki Kaisha Toshiba Pattern forming method utilizing first insulative and then conductive overlayer and underlayer
US6507029B1 (en) 1998-03-25 2003-01-14 Hitachi, Ltd. Sample processing apparatus and method for removing charge on sample through light irradiation

Also Published As

Publication number Publication date
JPS6320375B2 (enrdf_load_stackoverflow) 1988-04-27

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