JPS571654A - Polishing of thin piece - Google Patents
Polishing of thin pieceInfo
- Publication number
- JPS571654A JPS571654A JP7208780A JP7208780A JPS571654A JP S571654 A JPS571654 A JP S571654A JP 7208780 A JP7208780 A JP 7208780A JP 7208780 A JP7208780 A JP 7208780A JP S571654 A JPS571654 A JP S571654A
- Authority
- JP
- Japan
- Prior art keywords
- grinding
- wafer
- ground
- desired thickness
- standard plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To properly detect the time when a wafer is ground to a desired thickness by grinding the wafer and a standard plate having different color at the same time and discriminating grinder dust, in grinding semiconductor wafers. CONSTITUTION:When a semiconductor wafer 3 is ground through the contact with a grinding fixed plate 6, and a desired thickness is obtained, the surface of the standard plate 4 which is made of carbon and has different colour from the water contacts with the grinding fixed plate 6, and the standard plate 4 is ground a little, and black color of carbon mixes with lapping agent. Through discrimination of this formed color, grinding operation is stopped, and the wafer 3 having a desired thickness can be obtained.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7208780A JPS571654A (en) | 1980-05-28 | 1980-05-28 | Polishing of thin piece |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7208780A JPS571654A (en) | 1980-05-28 | 1980-05-28 | Polishing of thin piece |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS571654A true JPS571654A (en) | 1982-01-06 |
Family
ID=13479261
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7208780A Pending JPS571654A (en) | 1980-05-28 | 1980-05-28 | Polishing of thin piece |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS571654A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6095905A (en) * | 1998-07-01 | 2000-08-01 | Molecular Optoelectronics Corporation | Polishing fixture and method |
-
1980
- 1980-05-28 JP JP7208780A patent/JPS571654A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6095905A (en) * | 1998-07-01 | 2000-08-01 | Molecular Optoelectronics Corporation | Polishing fixture and method |
US6238274B1 (en) | 1998-07-01 | 2001-05-29 | Molecular Optoelectronics Corporation | Polishing method for a device |
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