JPS57161606A - Inline homogram displacement gauge - Google Patents

Inline homogram displacement gauge

Info

Publication number
JPS57161606A
JPS57161606A JP4759581A JP4759581A JPS57161606A JP S57161606 A JPS57161606 A JP S57161606A JP 4759581 A JP4759581 A JP 4759581A JP 4759581 A JP4759581 A JP 4759581A JP S57161606 A JPS57161606 A JP S57161606A
Authority
JP
Japan
Prior art keywords
light
homogram
displacement
gauge
parallel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4759581A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0472161B2 (enrdf_load_stackoverflow
Inventor
Joji Matsuda
Kouji Tenjinbayashi
Tsuguo Kono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP4759581A priority Critical patent/JPS57161606A/ja
Publication of JPS57161606A publication Critical patent/JPS57161606A/ja
Publication of JPH0472161B2 publication Critical patent/JPH0472161B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP4759581A 1981-03-31 1981-03-31 Inline homogram displacement gauge Granted JPS57161606A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4759581A JPS57161606A (en) 1981-03-31 1981-03-31 Inline homogram displacement gauge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4759581A JPS57161606A (en) 1981-03-31 1981-03-31 Inline homogram displacement gauge

Publications (2)

Publication Number Publication Date
JPS57161606A true JPS57161606A (en) 1982-10-05
JPH0472161B2 JPH0472161B2 (enrdf_load_stackoverflow) 1992-11-17

Family

ID=12779594

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4759581A Granted JPS57161606A (en) 1981-03-31 1981-03-31 Inline homogram displacement gauge

Country Status (1)

Country Link
JP (1) JPS57161606A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6244607A (ja) * 1985-08-22 1987-02-26 Tokyo Optical Co Ltd ホログラフイツク干渉計
JPH04282414A (ja) * 1991-03-12 1992-10-07 Hitachi Zosen Corp レーザビームの位置および角度制御装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6244607A (ja) * 1985-08-22 1987-02-26 Tokyo Optical Co Ltd ホログラフイツク干渉計
JPH04282414A (ja) * 1991-03-12 1992-10-07 Hitachi Zosen Corp レーザビームの位置および角度制御装置

Also Published As

Publication number Publication date
JPH0472161B2 (enrdf_load_stackoverflow) 1992-11-17

Similar Documents

Publication Publication Date Title
RU2007115154A (ru) Оптическое измерительное устройство для измерения характеристик нескольких поверхностей объекта измерения
KR960035057A (ko) 표면간 거리의 광학적 측정방법 및 장치
JPS5483854A (en) Measuring device
JPS649370A (en) Voltage detecting apparatus
JPS57161606A (en) Inline homogram displacement gauge
RU2179789C2 (ru) Лазерный центратор для рентгеновского излучателя
DE3928488A1 (de) Interferometrisches messsystem
GB1190564A (en) Method of and Means for Surface Measurement.
JPS6488327A (en) Shape measuring method for interference wave front
GB1524830A (en) Flow measurement apparatus
SU1712777A1 (ru) Способ контрол формы вогнутых эллиптических поверхностей
JPS5720636A (en) Measuring device for transmittance of lens
JPS57163839A (en) Lens meter
JPS57199909A (en) Distance measuring device
GB2022823A (en) A Device for Determining the Quality of the Finish Optical Surfaces
US2684011A (en) Method and apparatus for measuring angles between reflecting surfaces
JPS55140102A (en) Measuring device for flatness of inspected plane glass
JPS5722538A (en) Retroreflector
RU94020463A (ru) Рефлектометр
JPS5690227A (en) Optical fiber temperature detector
GB1019540A (en) A method and apparatus for determining the difference in area of an article from an article of known area
SU1695186A1 (ru) Теневое устройство
GB570022A (en) A projection system for the inspection of internal surfaces
SU1121605A1 (ru) Способ определени угла между оптической осью одноосного кристалла и его входной гранью
US2253174A (en) Measuring instrument