JPS57157535A - Measuring method for characteristic of semiconductor wafer - Google Patents
Measuring method for characteristic of semiconductor waferInfo
- Publication number
- JPS57157535A JPS57157535A JP4337681A JP4337681A JPS57157535A JP S57157535 A JPS57157535 A JP S57157535A JP 4337681 A JP4337681 A JP 4337681A JP 4337681 A JP4337681 A JP 4337681A JP S57157535 A JPS57157535 A JP S57157535A
- Authority
- JP
- Japan
- Prior art keywords
- life
- carriers
- wafer
- layer
- diodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/316—Testing of analog circuits
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4337681A JPS57157535A (en) | 1981-03-24 | 1981-03-24 | Measuring method for characteristic of semiconductor wafer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4337681A JPS57157535A (en) | 1981-03-24 | 1981-03-24 | Measuring method for characteristic of semiconductor wafer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57157535A true JPS57157535A (en) | 1982-09-29 |
Family
ID=12662104
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4337681A Pending JPS57157535A (en) | 1981-03-24 | 1981-03-24 | Measuring method for characteristic of semiconductor wafer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57157535A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5850088A (en) * | 1996-12-17 | 1998-12-15 | Mitsubishi Denki Kabushiki Kaisha | Teg for carrier lifetime evaluation |
-
1981
- 1981-03-24 JP JP4337681A patent/JPS57157535A/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5850088A (en) * | 1996-12-17 | 1998-12-15 | Mitsubishi Denki Kabushiki Kaisha | Teg for carrier lifetime evaluation |
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