JPS57156029A - Production of thin film of metallic oxide - Google Patents

Production of thin film of metallic oxide

Info

Publication number
JPS57156029A
JPS57156029A JP56040962A JP4096281A JPS57156029A JP S57156029 A JPS57156029 A JP S57156029A JP 56040962 A JP56040962 A JP 56040962A JP 4096281 A JP4096281 A JP 4096281A JP S57156029 A JPS57156029 A JP S57156029A
Authority
JP
Japan
Prior art keywords
thin film
substrate
metallic oxide
production
surface layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56040962A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0131932B2 (enrdf_load_stackoverflow
Inventor
Kaji Maezawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP56040962A priority Critical patent/JPS57156029A/ja
Publication of JPS57156029A publication Critical patent/JPS57156029A/ja
Publication of JPH0131932B2 publication Critical patent/JPH0131932B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J15/00—Chemical processes in general for reacting gaseous media with non-particulate solids, e.g. sheet material; Apparatus specially adapted therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Physical Vapour Deposition (AREA)
  • Thin Magnetic Films (AREA)
JP56040962A 1981-03-20 1981-03-20 Production of thin film of metallic oxide Granted JPS57156029A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56040962A JPS57156029A (en) 1981-03-20 1981-03-20 Production of thin film of metallic oxide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56040962A JPS57156029A (en) 1981-03-20 1981-03-20 Production of thin film of metallic oxide

Publications (2)

Publication Number Publication Date
JPS57156029A true JPS57156029A (en) 1982-09-27
JPH0131932B2 JPH0131932B2 (enrdf_load_stackoverflow) 1989-06-28

Family

ID=12595103

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56040962A Granted JPS57156029A (en) 1981-03-20 1981-03-20 Production of thin film of metallic oxide

Country Status (1)

Country Link
JP (1) JPS57156029A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0131932B2 (enrdf_load_stackoverflow) 1989-06-28

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