JPS646396A - Manufacturing method for thin film el element - Google Patents
Manufacturing method for thin film el elementInfo
- Publication number
- JPS646396A JPS646396A JP62159988A JP15998887A JPS646396A JP S646396 A JPS646396 A JP S646396A JP 62159988 A JP62159988 A JP 62159988A JP 15998887 A JP15998887 A JP 15998887A JP S646396 A JPS646396 A JP S646396A
- Authority
- JP
- Japan
- Prior art keywords
- film layer
- oxide
- oxide dielectric
- nitrogen gas
- phosphor film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electroluminescent Light Sources (AREA)
Abstract
PURPOSE:To make it possible to form a film layer strong in adhesion by setting the target at the sintered body of an oxide dielectric and laminating an oxide dielectric film layer on a phosphor film layer by the sputtering inside the atmosphere which includes nitrogen gas. CONSTITUTION:Setting the target 6 at the sintered body of an oxide, an oxide dielectric film 7 is formed on a phosphor film layer 4 by the sputtering inside the atmosphere which includes nitrogen gas. That is, since the oxide phosphor film layer 4 tends to be affected especially by oxygen plasma, favorable effect can be obtained, and as the sputtering gas, the nitrogen gas can achieve the purpose by itself, but it is desirable to use noble gas such as argon, etc., since it is excellent in filming speed. Hereby it becomes possible to form an oxide dielectric film high in adhesion without causing damage to the surface of the phosphor film layer.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62159988A JPS646396A (en) | 1987-06-26 | 1987-06-26 | Manufacturing method for thin film el element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62159988A JPS646396A (en) | 1987-06-26 | 1987-06-26 | Manufacturing method for thin film el element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS646396A true JPS646396A (en) | 1989-01-10 |
Family
ID=15705544
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62159988A Pending JPS646396A (en) | 1987-06-26 | 1987-06-26 | Manufacturing method for thin film el element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS646396A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4960579A (en) * | 1988-04-01 | 1990-10-02 | Union Carbide Corporation | Membrane process and system for nitrogen production |
-
1987
- 1987-06-26 JP JP62159988A patent/JPS646396A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4960579A (en) * | 1988-04-01 | 1990-10-02 | Union Carbide Corporation | Membrane process and system for nitrogen production |
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