JPS57156030A - Production of thin film of metallic oxide - Google Patents

Production of thin film of metallic oxide

Info

Publication number
JPS57156030A
JPS57156030A JP4096381A JP4096381A JPS57156030A JP S57156030 A JPS57156030 A JP S57156030A JP 4096381 A JP4096381 A JP 4096381A JP 4096381 A JP4096381 A JP 4096381A JP S57156030 A JPS57156030 A JP S57156030A
Authority
JP
Japan
Prior art keywords
substrate
thin film
surface layer
metallic
cooling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4096381A
Other languages
Japanese (ja)
Other versions
JPH0122810B2 (en
Inventor
Kaji Maezawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP4096381A priority Critical patent/JPS57156030A/en
Publication of JPS57156030A publication Critical patent/JPS57156030A/en
Publication of JPH0122810B2 publication Critical patent/JPH0122810B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J15/00—Chemical processes in general for reacting gaseous media with non-particulate solids, e.g. sheet material; Apparatus specially adapted therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

PURPOSE:To oxidize only the surface layer of a metallic thin film on a substrate without modifying the substrate by blowing reactive mixed gases of high temp. to said thin film, and cooling the opposite side of the substrate. CONSTITUTION:Reactive gaseous mixture 6 of gaseous oxygen and carbon monoxide or the like which are heated to high temp. is blown to the surface layer of a thin metallic film 5 such as Fe thin film formed by a method such as vacuum deposition or sputtering on a substrate 1 which is an inorg. or high polymer film. The opposite side of the substrate 1 is cooled with a cooling tank 2. Thereby, only the surface layer of the metal is locally oxidized while the modification of the substrate 1 is prevented by the cooling, and the thin film of the metallic oxide is formed.
JP4096381A 1981-03-20 1981-03-20 Production of thin film of metallic oxide Granted JPS57156030A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4096381A JPS57156030A (en) 1981-03-20 1981-03-20 Production of thin film of metallic oxide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4096381A JPS57156030A (en) 1981-03-20 1981-03-20 Production of thin film of metallic oxide

Publications (2)

Publication Number Publication Date
JPS57156030A true JPS57156030A (en) 1982-09-27
JPH0122810B2 JPH0122810B2 (en) 1989-04-27

Family

ID=12595133

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4096381A Granted JPS57156030A (en) 1981-03-20 1981-03-20 Production of thin film of metallic oxide

Country Status (1)

Country Link
JP (1) JPS57156030A (en)

Also Published As

Publication number Publication date
JPH0122810B2 (en) 1989-04-27

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