JPS572876A - Formation of copper film on inorganic oxide substrate - Google Patents

Formation of copper film on inorganic oxide substrate

Info

Publication number
JPS572876A
JPS572876A JP7668080A JP7668080A JPS572876A JP S572876 A JPS572876 A JP S572876A JP 7668080 A JP7668080 A JP 7668080A JP 7668080 A JP7668080 A JP 7668080A JP S572876 A JPS572876 A JP S572876A
Authority
JP
Japan
Prior art keywords
film
substrate
copper film
formation
inorganic oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7668080A
Other languages
Japanese (ja)
Other versions
JPS6150920B2 (en
Inventor
Yoshihiro Suzuki
Satoru Hagiwara
Mitsuru Ura
Komei Yatsuno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7668080A priority Critical patent/JPS572876A/en
Publication of JPS572876A publication Critical patent/JPS572876A/en
Publication of JPS6150920B2 publication Critical patent/JPS6150920B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/03—Use of materials for the substrate
    • H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/38—Improvement of the adhesion between the insulating substrate and the metal

Abstract

PURPOSE: To form a copper film with high adhesion on an inorg. oxide substate at a low treating temp. independently of the surface shape of the substrate by forming a copper film in close contact with the substrate and heat treating the film at 300°C W the melting temp. of the film in a nonreducing atmosphere.
CONSTITUTION: The inorg. oxide substrate is made of ceramic or glass, and the surface state may be complex. A copper film is formed on the surface of the substrate by chemical plating, electroplating, vapor deposition, sputtering or other means in close contact with the substrate, and the film is heat treated at 300°C W the melting temp. of the film, especially 600W950°C in a nonreducing atmosphere having ≤100ppm oxygen concn. The oxygen concn. of the atmosphere is regulated to ≤100ppm, yet ≥0.1ppm oxygen is required so as to increase the adhesion of the film.
COPYRIGHT: (C)1982,JPO&Japio
JP7668080A 1980-06-09 1980-06-09 Formation of copper film on inorganic oxide substrate Granted JPS572876A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7668080A JPS572876A (en) 1980-06-09 1980-06-09 Formation of copper film on inorganic oxide substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7668080A JPS572876A (en) 1980-06-09 1980-06-09 Formation of copper film on inorganic oxide substrate

Publications (2)

Publication Number Publication Date
JPS572876A true JPS572876A (en) 1982-01-08
JPS6150920B2 JPS6150920B2 (en) 1986-11-06

Family

ID=13612138

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7668080A Granted JPS572876A (en) 1980-06-09 1980-06-09 Formation of copper film on inorganic oxide substrate

Country Status (1)

Country Link
JP (1) JPS572876A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS615178A (en) * 1984-06-15 1986-01-10 東京マグネツト応用製品株式会社 Unlocking method and apparatus utilizing magnet
JPS6172181A (en) * 1984-09-14 1986-04-14 国産金属工業株式会社 Lock

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0351409U (en) * 1989-09-26 1991-05-20

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS615178A (en) * 1984-06-15 1986-01-10 東京マグネツト応用製品株式会社 Unlocking method and apparatus utilizing magnet
JPS6172181A (en) * 1984-09-14 1986-04-14 国産金属工業株式会社 Lock

Also Published As

Publication number Publication date
JPS6150920B2 (en) 1986-11-06

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