JPS57152141A - Inspecting device for semiconductor substrate - Google Patents

Inspecting device for semiconductor substrate

Info

Publication number
JPS57152141A
JPS57152141A JP3820181A JP3820181A JPS57152141A JP S57152141 A JPS57152141 A JP S57152141A JP 3820181 A JP3820181 A JP 3820181A JP 3820181 A JP3820181 A JP 3820181A JP S57152141 A JPS57152141 A JP S57152141A
Authority
JP
Japan
Prior art keywords
mounting
test table
substrate
semiconductor substrate
demounting jig
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3820181A
Other languages
English (en)
Inventor
Yukihisa Taguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KIYUUSHIYUU NIPPON DENKI KK
NEC Kyushu Ltd
Original Assignee
KIYUUSHIYUU NIPPON DENKI KK
NEC Kyushu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KIYUUSHIYUU NIPPON DENKI KK, NEC Kyushu Ltd filed Critical KIYUUSHIYUU NIPPON DENKI KK
Priority to JP3820181A priority Critical patent/JPS57152141A/ja
Publication of JPS57152141A publication Critical patent/JPS57152141A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
JP3820181A 1981-03-17 1981-03-17 Inspecting device for semiconductor substrate Pending JPS57152141A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3820181A JPS57152141A (en) 1981-03-17 1981-03-17 Inspecting device for semiconductor substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3820181A JPS57152141A (en) 1981-03-17 1981-03-17 Inspecting device for semiconductor substrate

Publications (1)

Publication Number Publication Date
JPS57152141A true JPS57152141A (en) 1982-09-20

Family

ID=12518724

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3820181A Pending JPS57152141A (en) 1981-03-17 1981-03-17 Inspecting device for semiconductor substrate

Country Status (1)

Country Link
JP (1) JPS57152141A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6014449A (ja) * 1983-06-15 1985-01-25 エスヴィージー・リトグラフィー・システムズ・インコーポレイテッド ウエハ処理機構

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5457867A (en) * 1977-10-17 1979-05-10 Nichiden Varian Kk Vacuum processor with automatic wafer feeder
JPS5539021A (en) * 1978-09-14 1980-03-18 Hitachi Electronics Eng Co Ltd Automatic plate tester

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5457867A (en) * 1977-10-17 1979-05-10 Nichiden Varian Kk Vacuum processor with automatic wafer feeder
JPS5539021A (en) * 1978-09-14 1980-03-18 Hitachi Electronics Eng Co Ltd Automatic plate tester

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6014449A (ja) * 1983-06-15 1985-01-25 エスヴィージー・リトグラフィー・システムズ・インコーポレイテッド ウエハ処理機構

Similar Documents

Publication Publication Date Title
DE3766592D1 (de) Verfahren zur vorrichtung zum pruefen des automatischen aufblasens von reifen zur inspektion.
CA2007182A1 (en) Tread centering method and apparatus
JPS51135461A (en) Exposing-method
JPS57152141A (en) Inspecting device for semiconductor substrate
JPS5592001A (en) Antenna angle adjustment device
JPS57158174A (en) Car assembly method and its device
JPS6429729A (en) Defective parts detector
ATE131658T1 (de) Verfahren zum befestigen eines metallischen schirmes im gehäuse eines vakuumschalters und vakuumschalter, versehen mit einem solchen schirm
JPS5530310A (en) Positioning method
JPS5747260A (en) Housing device for spare tire of battery car
JPS56136167A (en) Brushless motor
JPS523935A (en) Process for checking overflow of carbreator
JPS5364249A (en) Method of coating
JPS57121234A (en) Plasma processing and device thereof
KR900017120A (ko) 플라즈마 처리방법
JPS5214476A (en) Abnormality detecting method of chemical plant, etc.
JPS5432267A (en) Liquid processing method for semiconductor wafer
JPS56102409A (en) Holder for electric drill of drill stand
JPS56112739A (en) Inspection of semiconductor substrate
SU1634903A1 (ru) Уплотнение
JPS5268240A (en) Method for metallic coating
JPS6443746A (en) Through hole inspecting method for printed wiring board
JPS55145344A (en) Mthod for surface profile processing of 3-5 group compound semiconductor
KR970033418A (ko) 전자펌프 토출노즐 조립체 자동조립 방법 및 장치
JPS6486533A (en) Ic package inspection device