JPS57147253A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS57147253A JPS57147253A JP3207081A JP3207081A JPS57147253A JP S57147253 A JPS57147253 A JP S57147253A JP 3207081 A JP3207081 A JP 3207081A JP 3207081 A JP3207081 A JP 3207081A JP S57147253 A JPS57147253 A JP S57147253A
- Authority
- JP
- Japan
- Prior art keywords
- wire
- resist
- corners
- insulating film
- aluminum wire
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Weting (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3207081A JPS57147253A (en) | 1981-03-06 | 1981-03-06 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3207081A JPS57147253A (en) | 1981-03-06 | 1981-03-06 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57147253A true JPS57147253A (en) | 1982-09-11 |
Family
ID=12348611
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3207081A Pending JPS57147253A (en) | 1981-03-06 | 1981-03-06 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57147253A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7411211B1 (en) * | 1999-07-22 | 2008-08-12 | Semiconductor Energy Laboratory Co., Ltd. | Contact structure and semiconductor device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52124884A (en) * | 1976-04-13 | 1977-10-20 | Matsushita Electric Ind Co Ltd | Production of semiconductor device |
-
1981
- 1981-03-06 JP JP3207081A patent/JPS57147253A/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52124884A (en) * | 1976-04-13 | 1977-10-20 | Matsushita Electric Ind Co Ltd | Production of semiconductor device |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7411211B1 (en) * | 1999-07-22 | 2008-08-12 | Semiconductor Energy Laboratory Co., Ltd. | Contact structure and semiconductor device |
US7626202B2 (en) | 1999-07-22 | 2009-12-01 | Semiconductor Energy Laboratory Co., Ltd. | Contact structure and semiconductor device |
US7956359B2 (en) | 1999-07-22 | 2011-06-07 | Semiconductor Energy Laboratory Co., Ltd. | Contact structure and semiconductor device |
US8258515B2 (en) | 1999-07-22 | 2012-09-04 | Semiconductor Energy Laboratory Co., Ltd. | Contact structure and semiconductor device |
US8368076B2 (en) | 1999-07-22 | 2013-02-05 | Semiconductor Energy Laboratory Co., Ltd. | Contact structure and semiconductor device |
US8624253B2 (en) | 1999-07-22 | 2014-01-07 | Semiconductor Energy Laboratory Co., Ltd. | Contact structure and semiconductor device |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS55163860A (en) | Manufacture of semiconductor device | |
JPS57176746A (en) | Semiconductor integrated circuit and manufacture thereof | |
JPS57147253A (en) | Manufacture of semiconductor device | |
JPS57149752A (en) | Structure of multilayer wiring | |
JPS5568655A (en) | Manufacturing method of wiring | |
JPS55138859A (en) | Multilayer wiring type semiconductor device | |
JPS5482185A (en) | Manufacture of semiconductor device | |
JPS561547A (en) | Semiconductor device | |
JPS5522865A (en) | Manufacturing methof of semiconductor device | |
JPS56125856A (en) | Manufacture of semiconductor device | |
JPS5732654A (en) | Semiconductor integrated circuit device | |
JPS56104450A (en) | Manufacture of semiconductor device | |
JPS52151567A (en) | Protecting method of wiring layers | |
JPS575329A (en) | Manufacture of semiconductor device | |
JPS559415A (en) | Semiconductor manufacturing method | |
JPS52113161A (en) | Semiconductor device | |
JPS57184233A (en) | Semiconductor device | |
JPS57206049A (en) | Manufacture of semiconductor device | |
JPS572545A (en) | Manufacture of semiconductor device | |
JPS52141566A (en) | Semiconductor device and its manufacture | |
JPS5555546A (en) | Method of wiring semiconductor device | |
JPS5527684A (en) | Manufacturing method of semiconductor device | |
JPS55145347A (en) | Forming method of semiconductor protective film for semiconductor device | |
JPS57170551A (en) | Manufacture of semiconductor device | |
JPS52120781A (en) | Semiconductor device |