JPS57143862A - Manufacture of semiconductor integrated circuit - Google Patents

Manufacture of semiconductor integrated circuit

Info

Publication number
JPS57143862A
JPS57143862A JP56028231A JP2823181A JPS57143862A JP S57143862 A JPS57143862 A JP S57143862A JP 56028231 A JP56028231 A JP 56028231A JP 2823181 A JP2823181 A JP 2823181A JP S57143862 A JPS57143862 A JP S57143862A
Authority
JP
Japan
Prior art keywords
polycrystal
shaped
film
base
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56028231A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6232628B2 (enrdf_load_stackoverflow
Inventor
Minoru Taguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP56028231A priority Critical patent/JPS57143862A/ja
Publication of JPS57143862A publication Critical patent/JPS57143862A/ja
Publication of JPS6232628B2 publication Critical patent/JPS6232628B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/30—Devices controlled by electric currents or voltages
    • H10D48/32—Devices controlled by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H10D48/34—Bipolar devices
    • H10D48/345—Bipolar transistors having ohmic electrodes on emitter-like, base-like, and collector-like regions

Landscapes

  • Bipolar Integrated Circuits (AREA)
  • Bipolar Transistors (AREA)
JP56028231A 1981-02-27 1981-02-27 Manufacture of semiconductor integrated circuit Granted JPS57143862A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56028231A JPS57143862A (en) 1981-02-27 1981-02-27 Manufacture of semiconductor integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56028231A JPS57143862A (en) 1981-02-27 1981-02-27 Manufacture of semiconductor integrated circuit

Publications (2)

Publication Number Publication Date
JPS57143862A true JPS57143862A (en) 1982-09-06
JPS6232628B2 JPS6232628B2 (enrdf_load_stackoverflow) 1987-07-15

Family

ID=12242817

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56028231A Granted JPS57143862A (en) 1981-02-27 1981-02-27 Manufacture of semiconductor integrated circuit

Country Status (1)

Country Link
JP (1) JPS57143862A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0213320U (enrdf_load_stackoverflow) * 1988-07-08 1990-01-26

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS567466A (en) * 1979-06-29 1981-01-26 Ibm Selffalignment semiconductor device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS567466A (en) * 1979-06-29 1981-01-26 Ibm Selffalignment semiconductor device

Also Published As

Publication number Publication date
JPS6232628B2 (enrdf_load_stackoverflow) 1987-07-15

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