JPS57143833A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS57143833A JPS57143833A JP2908581A JP2908581A JPS57143833A JP S57143833 A JPS57143833 A JP S57143833A JP 2908581 A JP2908581 A JP 2908581A JP 2908581 A JP2908581 A JP 2908581A JP S57143833 A JPS57143833 A JP S57143833A
- Authority
- JP
- Japan
- Prior art keywords
- resin
- molded
- mold
- lead frame
- carrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000011347 resin Substances 0.000 abstract 7
- 229920005989 resin Polymers 0.000 abstract 7
- 239000007789 gas Substances 0.000 abstract 4
- 239000012159 carrier gas Substances 0.000 abstract 1
- 239000000112 cooling gas Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/565—Moulds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/16—Cooling
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C70/00—Shaping composites, i.e. plastics material comprising reinforcements, fillers or preformed parts, e.g. inserts
- B29C70/68—Shaping composites, i.e. plastics material comprising reinforcements, fillers or preformed parts, e.g. inserts by incorporating or moulding on preformed parts, e.g. inserts or layers, e.g. foam blocks
- B29C70/74—Moulding material on a relatively small portion of the preformed part, e.g. outsert moulding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
- B29L2031/00—Other particular articles
- B29L2031/34—Electrical apparatus, e.g. sparking plugs or parts thereof
- B29L2031/3406—Components, e.g. resistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Composite Materials (AREA)
- Health & Medical Sciences (AREA)
- Oral & Maxillofacial Surgery (AREA)
- Thermal Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Injection Moulding Of Plastics Or The Like (AREA)
Abstract
PURPOSE:To prevent resin from deforming, by providing a structure to induce cooling gas between a mold for hermetic resin and a molded resin. CONSTITUTION:A lead frame 3 which mounts a semiconductor element 1 and furnishes an electrode mounting 2 is set to a carrier 5. Next, the carrier 5 is loaded to the lower case 7 of a hermetic resin mold. Next, the upper 9 and lower cases 7 of mold are contacted and pressurized. Hermatic resin is supplied and tightened. As soon as the resin is molded and the upper 9 and lower cases 7 are opened, a gas pressure switch 6 is input. A lead frame 14 is cooled by clean gas through a carrier gas inlet 4. Next, a knockout pin 15 at the bottom of a cavity 13 pushes up the molded resin. At the same time, clean gas flows into the cavity from a gas inlet 8. The molded lead frame is cooled.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2908581A JPS57143833A (en) | 1981-02-27 | 1981-02-27 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2908581A JPS57143833A (en) | 1981-02-27 | 1981-02-27 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57143833A true JPS57143833A (en) | 1982-09-06 |
Family
ID=12266504
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2908581A Pending JPS57143833A (en) | 1981-02-27 | 1981-02-27 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57143833A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62149141A (en) * | 1985-12-23 | 1987-07-03 | Toshiba Mach Co Ltd | Cooling apparatus for molded ic part |
JPH0236039U (en) * | 1988-09-01 | 1990-03-08 | ||
JP2012045839A (en) * | 2010-08-27 | 2012-03-08 | Towa Corp | Cooling device of resin sealed substrate, cooling method, feed device, and resin sealing device |
-
1981
- 1981-02-27 JP JP2908581A patent/JPS57143833A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62149141A (en) * | 1985-12-23 | 1987-07-03 | Toshiba Mach Co Ltd | Cooling apparatus for molded ic part |
JPH0236039U (en) * | 1988-09-01 | 1990-03-08 | ||
JP2012045839A (en) * | 2010-08-27 | 2012-03-08 | Towa Corp | Cooling device of resin sealed substrate, cooling method, feed device, and resin sealing device |
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