JPS57136646A - Positive type photoresist developing method - Google Patents
Positive type photoresist developing methodInfo
- Publication number
- JPS57136646A JPS57136646A JP2358081A JP2358081A JPS57136646A JP S57136646 A JPS57136646 A JP S57136646A JP 2358081 A JP2358081 A JP 2358081A JP 2358081 A JP2358081 A JP 2358081A JP S57136646 A JPS57136646 A JP S57136646A
- Authority
- JP
- Japan
- Prior art keywords
- photoresist
- positive type
- type photoresist
- substrate
- unexposed area
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/38—Treatment before imagewise removal, e.g. prebaking
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2358081A JPS57136646A (en) | 1981-02-18 | 1981-02-18 | Positive type photoresist developing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2358081A JPS57136646A (en) | 1981-02-18 | 1981-02-18 | Positive type photoresist developing method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57136646A true JPS57136646A (en) | 1982-08-23 |
Family
ID=12114497
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2358081A Pending JPS57136646A (en) | 1981-02-18 | 1981-02-18 | Positive type photoresist developing method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57136646A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6275634A (ja) * | 1985-09-27 | 1987-04-07 | ノキア(ドィチュラント)ゲゼルシャフト ミット ベシュレンクテル ハフツング | 黒色マトリツクス層をつくる方法 |
JPS6291938A (ja) * | 1985-10-18 | 1987-04-27 | Fuji Photo Film Co Ltd | 製版方法 |
US5555234A (en) * | 1994-02-17 | 1996-09-10 | Dainippon Screen Mfg. Co., Ltd. | Developing method and apparatus |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5639540A (en) * | 1979-09-07 | 1981-04-15 | Matsushita Electric Ind Co Ltd | Photosensitive resin developing method |
JPS56144443A (en) * | 1980-04-12 | 1981-11-10 | Victor Co Of Japan Ltd | Developing method |
-
1981
- 1981-02-18 JP JP2358081A patent/JPS57136646A/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5639540A (en) * | 1979-09-07 | 1981-04-15 | Matsushita Electric Ind Co Ltd | Photosensitive resin developing method |
JPS56144443A (en) * | 1980-04-12 | 1981-11-10 | Victor Co Of Japan Ltd | Developing method |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6275634A (ja) * | 1985-09-27 | 1987-04-07 | ノキア(ドィチュラント)ゲゼルシャフト ミット ベシュレンクテル ハフツング | 黒色マトリツクス層をつくる方法 |
JPS6291938A (ja) * | 1985-10-18 | 1987-04-27 | Fuji Photo Film Co Ltd | 製版方法 |
JPH0515257B2 (ja) * | 1985-10-18 | 1993-03-01 | Fuji Photo Film Co Ltd | |
US5555234A (en) * | 1994-02-17 | 1996-09-10 | Dainippon Screen Mfg. Co., Ltd. | Developing method and apparatus |
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