JPS57128929A - Semiconductor device and manufacture of the same - Google Patents
Semiconductor device and manufacture of the sameInfo
- Publication number
- JPS57128929A JPS57128929A JP56015489A JP1548981A JPS57128929A JP S57128929 A JPS57128929 A JP S57128929A JP 56015489 A JP56015489 A JP 56015489A JP 1548981 A JP1548981 A JP 1548981A JP S57128929 A JPS57128929 A JP S57128929A
- Authority
- JP
- Japan
- Prior art keywords
- photoresistor
- film
- ion
- layer
- hardened
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
- H10P14/68—Organic materials, e.g. photoresists
- H10P14/683—Organic materials, e.g. photoresists carbon-based polymeric organic materials, e.g. polyimides, poly cyclobutene or PVC
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56015489A JPS57128929A (en) | 1981-02-04 | 1981-02-04 | Semiconductor device and manufacture of the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56015489A JPS57128929A (en) | 1981-02-04 | 1981-02-04 | Semiconductor device and manufacture of the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57128929A true JPS57128929A (en) | 1982-08-10 |
| JPS6326539B2 JPS6326539B2 (enExample) | 1988-05-30 |
Family
ID=11890203
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56015489A Granted JPS57128929A (en) | 1981-02-04 | 1981-02-04 | Semiconductor device and manufacture of the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57128929A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117594462A (zh) * | 2023-11-21 | 2024-02-23 | 颀中科技（苏州）有限公司 | 凸块的成型方法 |
-
1981
- 1981-02-04 JP JP56015489A patent/JPS57128929A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117594462A (zh) * | 2023-11-21 | 2024-02-23 | 颀中科技（苏州）有限公司 | 凸块的成型方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6326539B2 (enExample) | 1988-05-30 |
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