JPS57124912A - Manufacture for surface acoustic wave device - Google Patents

Manufacture for surface acoustic wave device

Info

Publication number
JPS57124912A
JPS57124912A JP20160381A JP20160381A JPS57124912A JP S57124912 A JPS57124912 A JP S57124912A JP 20160381 A JP20160381 A JP 20160381A JP 20160381 A JP20160381 A JP 20160381A JP S57124912 A JPS57124912 A JP S57124912A
Authority
JP
Japan
Prior art keywords
film
reed
resist film
making
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20160381A
Other languages
Japanese (ja)
Inventor
Hitoshi Yanagihara
Yoshitsugu Miura
Yoshihiko Noro
Takeshi Hazama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP20160381A priority Critical patent/JPS57124912A/en
Publication of JPS57124912A publication Critical patent/JPS57124912A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

PURPOSE:To increase the accuracy of reed-screen shaped electrode width and the reliability of bonding section, by making a metallic film thickness of reed- screen electrode of a surface acoustic wave device thin and making it at bonding section thick for a required amount. CONSTITUTION:An aluminum film 6 is formed on the surface of a piezoelectric substrate 1, and the 1st resist film 5 is coated for etching, to form a reed-screen electrode 2. Next, the 2nd resist film 5' is coated on the entire substrate having the electrode 2, and after drying at a low temperature, exposure and development are made, the resist film 5' on the surface of a connection section 4 is eliminated, and a window is made only at a region making the film thickness of a metallic film 6' thick on the connection section 4. Further, after a chromium film-gold film 6' is formed with the vacuum deposition method twice, the remaining resist film 5' is removed.
JP20160381A 1981-12-16 1981-12-16 Manufacture for surface acoustic wave device Pending JPS57124912A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20160381A JPS57124912A (en) 1981-12-16 1981-12-16 Manufacture for surface acoustic wave device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20160381A JPS57124912A (en) 1981-12-16 1981-12-16 Manufacture for surface acoustic wave device

Publications (1)

Publication Number Publication Date
JPS57124912A true JPS57124912A (en) 1982-08-04

Family

ID=16443781

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20160381A Pending JPS57124912A (en) 1981-12-16 1981-12-16 Manufacture for surface acoustic wave device

Country Status (1)

Country Link
JP (1) JPS57124912A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0444408A (en) * 1990-06-12 1992-02-14 Toshiba Corp Manufacture of surface acoustic wave device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5550717A (en) * 1978-10-06 1980-04-12 Hitachi Ltd Manufacture for surface acoustic wave filter

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5550717A (en) * 1978-10-06 1980-04-12 Hitachi Ltd Manufacture for surface acoustic wave filter

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0444408A (en) * 1990-06-12 1992-02-14 Toshiba Corp Manufacture of surface acoustic wave device

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