JPS57120936A - Step and repeat camera device - Google Patents

Step and repeat camera device

Info

Publication number
JPS57120936A
JPS57120936A JP636981A JP636981A JPS57120936A JP S57120936 A JPS57120936 A JP S57120936A JP 636981 A JP636981 A JP 636981A JP 636981 A JP636981 A JP 636981A JP S57120936 A JPS57120936 A JP S57120936A
Authority
JP
Japan
Prior art keywords
foreign matter
reticle
machine
inspecting
laser beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP636981A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6323539B2 (enrdf_load_stackoverflow
Inventor
Soichi Tsuuzawa
Hiroyuki Ibe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP636981A priority Critical patent/JPS57120936A/ja
Publication of JPS57120936A publication Critical patent/JPS57120936A/ja
Publication of JPS6323539B2 publication Critical patent/JPS6323539B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • G03F7/70866—Environment aspects, e.g. pressure of beam-path gas, temperature of mask or workpiece

Landscapes

  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Atmospheric Sciences (AREA)
  • Toxicology (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP636981A 1981-01-21 1981-01-21 Step and repeat camera device Granted JPS57120936A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP636981A JPS57120936A (en) 1981-01-21 1981-01-21 Step and repeat camera device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP636981A JPS57120936A (en) 1981-01-21 1981-01-21 Step and repeat camera device

Publications (2)

Publication Number Publication Date
JPS57120936A true JPS57120936A (en) 1982-07-28
JPS6323539B2 JPS6323539B2 (enrdf_load_stackoverflow) 1988-05-17

Family

ID=11636447

Family Applications (1)

Application Number Title Priority Date Filing Date
JP636981A Granted JPS57120936A (en) 1981-01-21 1981-01-21 Step and repeat camera device

Country Status (1)

Country Link
JP (1) JPS57120936A (enrdf_load_stackoverflow)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6054142U (ja) * 1983-09-20 1985-04-16 日本電気株式会社 位置合わせ露光装置用チヤンバ−
JPS6197555A (ja) * 1984-10-19 1986-05-16 Tokyo Optical Co Ltd 表面検査装置
JPS61100932A (ja) * 1984-10-24 1986-05-19 Hitachi Ltd 露光装置
JPH0311612A (ja) * 1989-06-07 1991-01-18 Nec Yamagata Ltd 露光装置
JPH0350900U (enrdf_load_stackoverflow) * 1989-09-21 1991-05-17
JPH08255749A (ja) * 1996-01-26 1996-10-01 Hitachi Ltd 露光方法
JPH08279460A (ja) * 1996-01-26 1996-10-22 Hitachi Ltd 露光装置
JP2002139825A (ja) * 2000-11-02 2002-05-17 Ibiden Co Ltd 露光用マスクの清掃方法および露光用マスクの清掃装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5386169A (en) * 1977-01-07 1978-07-29 Hitachi Ltd Exposure apparatus
JPS5434777A (en) * 1977-08-24 1979-03-14 Hitachi Ltd Mask aligner
JPS55102233A (en) * 1979-01-30 1980-08-05 Matsushita Electric Ind Co Ltd Removing method of dust
JPS578435A (en) * 1980-05-16 1982-01-16 Gca Corp Automatic detector for fine particle on wide ranging surface left optically unground

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5386169A (en) * 1977-01-07 1978-07-29 Hitachi Ltd Exposure apparatus
JPS5434777A (en) * 1977-08-24 1979-03-14 Hitachi Ltd Mask aligner
JPS55102233A (en) * 1979-01-30 1980-08-05 Matsushita Electric Ind Co Ltd Removing method of dust
JPS578435A (en) * 1980-05-16 1982-01-16 Gca Corp Automatic detector for fine particle on wide ranging surface left optically unground

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6054142U (ja) * 1983-09-20 1985-04-16 日本電気株式会社 位置合わせ露光装置用チヤンバ−
JPS6197555A (ja) * 1984-10-19 1986-05-16 Tokyo Optical Co Ltd 表面検査装置
JPS61100932A (ja) * 1984-10-24 1986-05-19 Hitachi Ltd 露光装置
JPH0311612A (ja) * 1989-06-07 1991-01-18 Nec Yamagata Ltd 露光装置
JPH0350900U (enrdf_load_stackoverflow) * 1989-09-21 1991-05-17
JPH08255749A (ja) * 1996-01-26 1996-10-01 Hitachi Ltd 露光方法
JPH08279460A (ja) * 1996-01-26 1996-10-22 Hitachi Ltd 露光装置
JP2002139825A (ja) * 2000-11-02 2002-05-17 Ibiden Co Ltd 露光用マスクの清掃方法および露光用マスクの清掃装置

Also Published As

Publication number Publication date
JPS6323539B2 (enrdf_load_stackoverflow) 1988-05-17

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