JPS56120137A - Semiconductor pellet pickup device - Google Patents

Semiconductor pellet pickup device

Info

Publication number
JPS56120137A
JPS56120137A JP2339480A JP2339480A JPS56120137A JP S56120137 A JPS56120137 A JP S56120137A JP 2339480 A JP2339480 A JP 2339480A JP 2339480 A JP2339480 A JP 2339480A JP S56120137 A JPS56120137 A JP S56120137A
Authority
JP
Japan
Prior art keywords
pellet
nozzle
pellets
spot
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2339480A
Other languages
Japanese (ja)
Inventor
Yuji Miura
Fumio Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP2339480A priority Critical patent/JPS56120137A/en
Publication of JPS56120137A publication Critical patent/JPS56120137A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67132Apparatus for placing on an insulating substrate, e.g. tape
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2221/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
    • H01L2221/67Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
    • H01L2221/683Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L2221/68304Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L2221/68318Auxiliary support including means facilitating the separation of a device or wafer from the auxiliary support
    • H01L2221/68322Auxiliary support including means facilitating the selective separation of some of a plurality of devices from the auxiliary support

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Die Bonding (AREA)

Abstract

PURPOSE:To arrange so that pellets may cause edge cracking or pressure breakdown by supporting the pellets flexibly at the lower part of the pellets and reducing a contact stress between a suction nozzle and a pellet with the help of a spot faced hole. CONSTITUTION:An optional pellet 1 to be sucked by a cassette ring 4 is caused to shift toward the lower part of a suction nozzle 2 and then the nozzle 2 arranged on a backup holder 5 is caused to descend to come in contact with the pellet 1, so that the nozzle sucks the pellet. In this case, because of the existence of the spot-faced hole, it suports the pellet 1 flexibly by the lower part of the pellet 1 when the sheet extends toward the hole 6 and a contact stress between the nozzle and the pellet 1 is eased by the spot-faced hole 6.
JP2339480A 1980-02-28 1980-02-28 Semiconductor pellet pickup device Pending JPS56120137A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2339480A JPS56120137A (en) 1980-02-28 1980-02-28 Semiconductor pellet pickup device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2339480A JPS56120137A (en) 1980-02-28 1980-02-28 Semiconductor pellet pickup device

Publications (1)

Publication Number Publication Date
JPS56120137A true JPS56120137A (en) 1981-09-21

Family

ID=12109285

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2339480A Pending JPS56120137A (en) 1980-02-28 1980-02-28 Semiconductor pellet pickup device

Country Status (1)

Country Link
JP (1) JPS56120137A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59204247A (en) * 1983-05-04 1984-11-19 Rohm Co Ltd Tape guide at die pickup part in die bonding device
JP2009106430A (en) * 2007-10-29 2009-05-21 Manabu Kaseyama Holder for preventing thread loosening in bobbin for sewing machine
JP2011243797A (en) * 2010-05-19 2011-12-01 Canon Machinery Inc Pickup device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59204247A (en) * 1983-05-04 1984-11-19 Rohm Co Ltd Tape guide at die pickup part in die bonding device
JP2009106430A (en) * 2007-10-29 2009-05-21 Manabu Kaseyama Holder for preventing thread loosening in bobbin for sewing machine
JP2011243797A (en) * 2010-05-19 2011-12-01 Canon Machinery Inc Pickup device

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