JPS57119504A - Manufacture of quartz oscillator - Google Patents

Manufacture of quartz oscillator

Info

Publication number
JPS57119504A
JPS57119504A JP486881A JP486881A JPS57119504A JP S57119504 A JPS57119504 A JP S57119504A JP 486881 A JP486881 A JP 486881A JP 486881 A JP486881 A JP 486881A JP S57119504 A JPS57119504 A JP S57119504A
Authority
JP
Japan
Prior art keywords
titanium oxide
film
photoresist
electroless plating
quartz oscillator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP486881A
Other languages
Japanese (ja)
Other versions
JPS645764B2 (en
Inventor
Eiji Togawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP486881A priority Critical patent/JPS57119504A/en
Publication of JPS57119504A publication Critical patent/JPS57119504A/en
Publication of JPS645764B2 publication Critical patent/JPS645764B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To form an electrode film which has extremely superior adhesive strength by forming a titanium oxide film after quartz etching, by performing electroless plating, and peeling photoresist. CONSTITUTION:After quartz etching is performed by using photoresist 4 and a metallic film of chromium 2 and gold 3 as a mask, a film of titanium oxide 5 is formed over the entire surface and electroless plating is performed over the titanium oxide 5 on adequate conditions. Then, the photoresist 4 is peeled off to form a side-electrode film having superior adhesive strength on the side surface of a quartz oscillator. The thickness of the titanium oxide 5 is about 50- 1,000Angstrom , and that of electroless plating is about 50-10,000Angstrom .
JP486881A 1981-01-16 1981-01-16 Manufacture of quartz oscillator Granted JPS57119504A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP486881A JPS57119504A (en) 1981-01-16 1981-01-16 Manufacture of quartz oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP486881A JPS57119504A (en) 1981-01-16 1981-01-16 Manufacture of quartz oscillator

Publications (2)

Publication Number Publication Date
JPS57119504A true JPS57119504A (en) 1982-07-26
JPS645764B2 JPS645764B2 (en) 1989-01-31

Family

ID=11595646

Family Applications (1)

Application Number Title Priority Date Filing Date
JP486881A Granted JPS57119504A (en) 1981-01-16 1981-01-16 Manufacture of quartz oscillator

Country Status (1)

Country Link
JP (1) JPS57119504A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005136801A (en) * 2003-10-31 2005-05-26 Kyocera Kinseki Corp Electrode structure for piezoelectric vibrator

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005136801A (en) * 2003-10-31 2005-05-26 Kyocera Kinseki Corp Electrode structure for piezoelectric vibrator

Also Published As

Publication number Publication date
JPS645764B2 (en) 1989-01-31

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