JPS57111936A - Astigmatism correcting device for electron microscope - Google Patents

Astigmatism correcting device for electron microscope

Info

Publication number
JPS57111936A
JPS57111936A JP55187658A JP18765880A JPS57111936A JP S57111936 A JPS57111936 A JP S57111936A JP 55187658 A JP55187658 A JP 55187658A JP 18765880 A JP18765880 A JP 18765880A JP S57111936 A JPS57111936 A JP S57111936A
Authority
JP
Japan
Prior art keywords
specimen
power source
spinning
deflection
irradiating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55187658A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6231473B2 (enrdf_load_stackoverflow
Inventor
Hisao Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP55187658A priority Critical patent/JPS57111936A/ja
Publication of JPS57111936A publication Critical patent/JPS57111936A/ja
Publication of JPS6231473B2 publication Critical patent/JPS6231473B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP55187658A 1980-12-27 1980-12-27 Astigmatism correcting device for electron microscope Granted JPS57111936A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55187658A JPS57111936A (en) 1980-12-27 1980-12-27 Astigmatism correcting device for electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55187658A JPS57111936A (en) 1980-12-27 1980-12-27 Astigmatism correcting device for electron microscope

Publications (2)

Publication Number Publication Date
JPS57111936A true JPS57111936A (en) 1982-07-12
JPS6231473B2 JPS6231473B2 (enrdf_load_stackoverflow) 1987-07-08

Family

ID=16209924

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55187658A Granted JPS57111936A (en) 1980-12-27 1980-12-27 Astigmatism correcting device for electron microscope

Country Status (1)

Country Link
JP (1) JPS57111936A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004146192A (ja) * 2002-10-24 2004-05-20 Hitachi High-Technologies Corp 透過電子顕微鏡による試料観察方法
JP2008112748A (ja) * 2008-02-04 2008-05-15 Hitachi Ltd 走査形荷電粒子顕微鏡、並びに走査形荷電粒子顕微鏡の非点収差補正方法
US20140061464A1 (en) * 2012-09-04 2014-03-06 Fei Company Method of Investigating and Correcting Aberrations in a Charged-Particle Lens System

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55121259A (en) * 1979-03-14 1980-09-18 Hitachi Ltd Elelctron microscope

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55121259A (en) * 1979-03-14 1980-09-18 Hitachi Ltd Elelctron microscope

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004146192A (ja) * 2002-10-24 2004-05-20 Hitachi High-Technologies Corp 透過電子顕微鏡による試料観察方法
JP2008112748A (ja) * 2008-02-04 2008-05-15 Hitachi Ltd 走査形荷電粒子顕微鏡、並びに走査形荷電粒子顕微鏡の非点収差補正方法
US20140061464A1 (en) * 2012-09-04 2014-03-06 Fei Company Method of Investigating and Correcting Aberrations in a Charged-Particle Lens System
JP2014053304A (ja) * 2012-09-04 2014-03-20 Fei Co 荷電粒子レンズ系における収差を調査及び補正する方法
CN103681188A (zh) * 2012-09-04 2014-03-26 Fei公司 探查和校正带电粒子透镜系统中的像差的方法
US9136087B2 (en) 2012-09-04 2015-09-15 Fei Company Method of investigating and correcting aberrations in a charged-particle lens system

Also Published As

Publication number Publication date
JPS6231473B2 (enrdf_load_stackoverflow) 1987-07-08

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