JPS57107058A - Multilayer wiring forming method - Google Patents

Multilayer wiring forming method

Info

Publication number
JPS57107058A
JPS57107058A JP18474380A JP18474380A JPS57107058A JP S57107058 A JPS57107058 A JP S57107058A JP 18474380 A JP18474380 A JP 18474380A JP 18474380 A JP18474380 A JP 18474380A JP S57107058 A JPS57107058 A JP S57107058A
Authority
JP
Japan
Prior art keywords
layer wiring
upper layer
wiring
connection part
resist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18474380A
Other languages
English (en)
Other versions
JPS6262467B2 (ja
Inventor
Shuji Tabuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP18474380A priority Critical patent/JPS57107058A/ja
Publication of JPS57107058A publication Critical patent/JPS57107058A/ja
Publication of JPS6262467B2 publication Critical patent/JPS6262467B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP18474380A 1980-12-25 1980-12-25 Multilayer wiring forming method Granted JPS57107058A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18474380A JPS57107058A (en) 1980-12-25 1980-12-25 Multilayer wiring forming method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18474380A JPS57107058A (en) 1980-12-25 1980-12-25 Multilayer wiring forming method

Publications (2)

Publication Number Publication Date
JPS57107058A true JPS57107058A (en) 1982-07-03
JPS6262467B2 JPS6262467B2 (ja) 1987-12-26

Family

ID=16158564

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18474380A Granted JPS57107058A (en) 1980-12-25 1980-12-25 Multilayer wiring forming method

Country Status (1)

Country Link
JP (1) JPS57107058A (ja)

Also Published As

Publication number Publication date
JPS6262467B2 (ja) 1987-12-26

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