JPS57100720A - Manufacture of amorphous semiconductor film - Google Patents
Manufacture of amorphous semiconductor filmInfo
- Publication number
- JPS57100720A JPS57100720A JP55177891A JP17789180A JPS57100720A JP S57100720 A JPS57100720 A JP S57100720A JP 55177891 A JP55177891 A JP 55177891A JP 17789180 A JP17789180 A JP 17789180A JP S57100720 A JPS57100720 A JP S57100720A
- Authority
- JP
- Japan
- Prior art keywords
- gas flow
- exit
- control plate
- film
- vicinity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02524—Group 14 semiconducting materials
- H01L21/02532—Silicon, silicon germanium, germanium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Plasma & Fusion (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Photovoltaic Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55177891A JPS57100720A (en) | 1980-12-16 | 1980-12-16 | Manufacture of amorphous semiconductor film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55177891A JPS57100720A (en) | 1980-12-16 | 1980-12-16 | Manufacture of amorphous semiconductor film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57100720A true JPS57100720A (en) | 1982-06-23 |
Family
ID=16038861
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP55177891A Pending JPS57100720A (en) | 1980-12-16 | 1980-12-16 | Manufacture of amorphous semiconductor film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57100720A (ja) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59104117A (ja) * | 1982-12-06 | 1984-06-15 | Agency Of Ind Science & Technol | 減圧堆積装置 |
JPS59110701U (ja) * | 1983-01-18 | 1984-07-26 | 株式会社富士技研 | 自在車輪付走行体 |
JPS612319A (ja) * | 1984-06-14 | 1986-01-08 | Semiconductor Energy Lab Co Ltd | Cvd装置 |
JPH02224231A (ja) * | 1988-11-30 | 1990-09-06 | Tokyo Electron Ltd | プラズマ処理装置 |
US6167834B1 (en) | 1986-12-19 | 2001-01-02 | Applied Materials, Inc. | Thermal CVD/PECVD reactor and use for thermal chemical vapor deposition of silicon dioxide and in-situ multi-step planarized process |
KR100364091B1 (ko) * | 2000-06-27 | 2002-12-11 | 주식회사 아펙스 | 다채널 플레이트를 구비한 증착장치 |
-
1980
- 1980-12-16 JP JP55177891A patent/JPS57100720A/ja active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59104117A (ja) * | 1982-12-06 | 1984-06-15 | Agency Of Ind Science & Technol | 減圧堆積装置 |
JPS59110701U (ja) * | 1983-01-18 | 1984-07-26 | 株式会社富士技研 | 自在車輪付走行体 |
JPS647041Y2 (ja) * | 1983-01-18 | 1989-02-23 | ||
JPS612319A (ja) * | 1984-06-14 | 1986-01-08 | Semiconductor Energy Lab Co Ltd | Cvd装置 |
US6167834B1 (en) | 1986-12-19 | 2001-01-02 | Applied Materials, Inc. | Thermal CVD/PECVD reactor and use for thermal chemical vapor deposition of silicon dioxide and in-situ multi-step planarized process |
JPH02224231A (ja) * | 1988-11-30 | 1990-09-06 | Tokyo Electron Ltd | プラズマ処理装置 |
KR100364091B1 (ko) * | 2000-06-27 | 2002-12-11 | 주식회사 아펙스 | 다채널 플레이트를 구비한 증착장치 |
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