JPS5698604A - Optical device for determination of incremental position - Google Patents
Optical device for determination of incremental positionInfo
- Publication number
- JPS5698604A JPS5698604A JP17915380A JP17915380A JPS5698604A JP S5698604 A JPS5698604 A JP S5698604A JP 17915380 A JP17915380 A JP 17915380A JP 17915380 A JP17915380 A JP 17915380A JP S5698604 A JPS5698604 A JP S5698604A
- Authority
- JP
- Japan
- Prior art keywords
- determination
- optical device
- incremental position
- incremental
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
- G01D5/2454—Encoders incorporating incremental and absolute signals
- G01D5/2455—Encoders incorporating incremental and absolute signals with incremental and absolute tracks on the same encoder
- G01D5/2457—Incremental encoders having reference marks
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34776—Absolute encoders with analogue or digital scales
- G01D5/34792—Absolute encoders with analogue or digital scales with only digital scales or both digital and incremental scales
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03M—CODING; DECODING; CODE CONVERSION IN GENERAL
- H03M1/00—Analogue/digital conversion; Digital/analogue conversion
- H03M1/12—Analogue/digital converters
- H03M1/22—Analogue/digital converters pattern-reading type
- H03M1/24—Analogue/digital converters pattern-reading type using relatively movable reader and disc or strip
- H03M1/28—Analogue/digital converters pattern-reading type using relatively movable reader and disc or strip with non-weighted coding
- H03M1/30—Analogue/digital converters pattern-reading type using relatively movable reader and disc or strip with non-weighted coding incremental
- H03M1/308—Analogue/digital converters pattern-reading type using relatively movable reader and disc or strip with non-weighted coding incremental with additional pattern means for determining the absolute position, e.g. reference marks
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Theoretical Computer Science (AREA)
- Optical Transform (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Control Of Position Or Direction (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE2952106A DE2952106C2 (de) | 1979-12-22 | 1979-12-22 | Lichtelektrische inkrementale Längen- oder Winkelmeßeinrichtung |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5698604A true JPS5698604A (en) | 1981-08-08 |
JPH0318130B2 JPH0318130B2 (ja) | 1991-03-11 |
Family
ID=6089495
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17915380A Granted JPS5698604A (en) | 1979-12-22 | 1980-12-19 | Optical device for determination of incremental position |
Country Status (8)
Country | Link |
---|---|
US (1) | US4403859A (ja) |
JP (1) | JPS5698604A (ja) |
AT (1) | AT385124B (ja) |
CH (1) | CH649629A5 (ja) |
DE (1) | DE2952106C2 (ja) |
FR (1) | FR2473171A1 (ja) |
GB (1) | GB2067282B (ja) |
IT (1) | IT1136225B (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5837515A (ja) * | 1981-08-10 | 1983-03-04 | Yokogawa Hewlett Packard Ltd | 光変調装置 |
JPS60183818U (ja) * | 1984-05-16 | 1985-12-06 | 東洋電装株式会社 | 回転エンコ−ダ |
JPS6474411A (en) * | 1987-09-16 | 1989-03-20 | Yamaha Corp | Position detector |
JP2003065803A (ja) * | 2001-08-28 | 2003-03-05 | Mitsutoyo Corp | 光電式エンコーダ |
Families Citing this family (65)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3039483C2 (de) * | 1980-10-18 | 1986-09-11 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Inkrementale Längen- oder Winkelmeßeinrichtung |
DE3104972C2 (de) * | 1981-02-12 | 1985-06-20 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Lichtelektrische inkrementale Positioniereinrichtung |
US4461575A (en) * | 1981-09-17 | 1984-07-24 | Harris Corporation | Reference marker/correlation scheme for optical measurements |
DE3144334C2 (de) * | 1981-11-07 | 1985-06-13 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Wegmeßeinrichtung mit Referenzmarken |
DE3201005A1 (de) * | 1982-01-15 | 1983-07-28 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Einrichtung zur fehlerkorrektur bei positionsmesssystemen |
DE3204012C1 (de) * | 1982-02-05 | 1983-02-03 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Inkrementale Messeinrichtung |
CH658514A5 (de) * | 1982-02-09 | 1986-11-14 | Wild Heerbrugg Ag | Verfahren und vorrichtung zur erfassung einer messgroesse. |
JPS58148914A (ja) * | 1982-03-02 | 1983-09-05 | Fanuc Ltd | パルスコ−ダ |
DE3218903C2 (de) * | 1982-05-19 | 1986-05-15 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Lichtelektrische Meßeinrichtung |
DE3229846C2 (de) * | 1982-08-11 | 1984-05-24 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Längen- oder Winkelmeßeinrichtung |
DE3245914C1 (de) * | 1982-12-11 | 1984-03-29 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Messeinrichtung |
DE3308813C2 (de) * | 1983-03-12 | 1985-02-07 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Meßeinrichtung |
DE3308814C2 (de) * | 1983-03-12 | 1985-02-07 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Meßeinrichtung |
DE3340866A1 (de) * | 1983-03-26 | 1985-05-23 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Wegmesseinrichtung |
DE3311203A1 (de) * | 1983-03-26 | 1984-10-04 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Verfahren zum reproduzieren einer bezugsposition |
DE3311204A1 (de) * | 1983-03-26 | 1984-10-04 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Inkrementale laengen- oder winkelmesseinrichtung |
DE3325803C2 (de) * | 1983-07-16 | 1986-11-20 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Inkrementale, lichtelektrische Meßeinrichtung |
US4678908A (en) * | 1983-07-25 | 1987-07-07 | Bei Electronics, Inc. | Zero reference generating method and apparatus for optical encoders |
US4602155A (en) * | 1983-07-25 | 1986-07-22 | Bei Electronics, Inc. | Zero reference generating method and apparatus for optical encoders |
DD219566A1 (de) * | 1983-08-05 | 1985-03-06 | Harry Trumpold | Hochaufloesendes optisches laengenmessverfahren mit codiertem absolutmassstab zur durchfuehrung des verfahrens |
DD221828A1 (de) * | 1983-09-01 | 1985-05-02 | Zeiss Jena Veb Carl | Einrichtung zur fotoelektrischen abtastung von teilungen im auflicht |
US4561846A (en) * | 1983-09-02 | 1985-12-31 | Denar Corporation | Dental pantograph |
DE3334398C1 (de) * | 1983-09-23 | 1984-11-22 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Messeinrichtung |
DD225497A1 (de) * | 1984-04-02 | 1985-07-31 | Zeiss Jena Veb Carl | Einrichtung und verfahren zum messen und einstellen von laengen |
DE3562948D1 (en) * | 1984-04-21 | 1988-06-30 | Heidenhain Gmbh Dr Johannes | Position-measuring device |
AT396631B (de) * | 1984-07-06 | 1993-10-25 | Rsf Elektronik Gmbh | Inkrementales messsystem |
DE3427411A1 (de) * | 1984-07-25 | 1986-02-06 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Messeinrichtung |
DE3509102A1 (de) * | 1985-03-14 | 1986-09-18 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Messeinrichtung |
DE3527546C1 (de) * | 1985-08-01 | 1986-10-02 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Vorrichtung zum Verbinden einer Positionsmesseinrichtung mit zwei relativ zueinander beweglichen Objekten |
DE3536466A1 (de) * | 1985-10-12 | 1987-04-16 | Bodenseewerk Geraetetech | Nullimpulserzeuger zur erzeugung eines impulses bei erreichen einer vorgegebenen lage eines traegers |
DE3700777C2 (de) * | 1986-01-14 | 1994-05-05 | Canon Kk | Vorrichtung zur Erfassung der Position eines Objektes |
DE3604215A1 (de) * | 1986-02-11 | 1987-08-13 | Heidenhain Gmbh Dr Johannes | Lichtelektrische laengen- oder winkelmesseinrichtung |
DE8613887U1 (de) * | 1986-05-22 | 1990-09-13 | Dr. Johannes Heidenhain Gmbh, 83301 Traunreut | Meßeinrichtung |
US5109430A (en) * | 1986-07-22 | 1992-04-28 | Schlumberger Technologies, Inc. | Mask alignment and measurement of critical dimensions in integrated circuits |
US4965842A (en) * | 1986-07-22 | 1990-10-23 | Schlumberger Technologies, Inc. | Method and apparatus for measuring feature dimensions using controlled dark-field illumination |
US4967075A (en) * | 1986-09-16 | 1990-10-30 | High Yield Technology | Velocity monitoring method and apparatus |
SE460928B (sv) * | 1986-10-13 | 1989-12-04 | Johansson Ab C E | Absolutmaetande skalsystem |
DE3726678C1 (de) * | 1987-08-11 | 1989-03-09 | Heidenhain Gmbh Dr Johannes | Inkrementale Laengen- oder Winkelmesseinrichtung |
DE3734870A1 (de) * | 1987-10-15 | 1989-04-27 | Heidenhain Gmbh Dr Johannes | Einrichtung zum reproduzierbaren einstellen von winkellagen |
DE3742295A1 (de) * | 1987-12-14 | 1989-06-22 | Heidenhain Gmbh Dr Johannes | Positionsmesseinrichtung mit mehreren abtaststellen |
DE3809569A1 (de) * | 1988-03-22 | 1989-10-05 | Frankl & Kirchner | Positionsgeber |
US4982509A (en) * | 1988-08-19 | 1991-01-08 | Delta International Machinery Corp. | Measurement system having multiple display orientations |
DE3837134A1 (de) * | 1988-11-02 | 1990-05-03 | Oelsch Kg | Beruehrungsloser, digitaler lineargeber |
JP2666859B2 (ja) * | 1988-11-25 | 1997-10-22 | 日本電気株式会社 | 目合せ用バーニヤパターンを備えた半導体装置 |
AT394781B (de) * | 1989-02-03 | 1992-06-25 | Rsf Elektronik Gmbh | Inkrementales messsystem |
DE3914557A1 (de) * | 1989-05-03 | 1990-11-08 | Heidenhain Gmbh Dr Johannes | Positionsmesseinrichtung mit mehreren abtaststellen |
US5020236A (en) * | 1990-02-12 | 1991-06-04 | Pietzsch Ag | Method of measuring the distance between the axles or wheels of a vehicle, and device for doing so |
GB9109501D0 (en) * | 1991-05-02 | 1991-06-26 | Orton Paul A | Shaft displacement measuring system |
DE59102126D1 (de) * | 1991-05-18 | 1994-08-11 | Heidenhain Gmbh Dr Johannes | Interferentielle Positionsmessvorrichtung. |
SE470271B (sv) * | 1992-06-29 | 1993-12-20 | Johansson Ab C E | Skalsystem för absolutmätning |
DE4225320C1 (de) * | 1992-07-31 | 1994-01-27 | Trumpold Harry Prof Dr Ing Hab | Absolut-Längenmeßsystem zur Bestimmung der Lage zweier relativ zueinander beweglicher Objekte |
JP3683350B2 (ja) * | 1996-07-24 | 2005-08-17 | 株式会社ソキア | 電子レベル用標尺及び電子レベル |
DE19642200A1 (de) * | 1996-10-12 | 1998-04-16 | Heidenhain Gmbh Dr Johannes | Kontrollvorrichtung und Verfahren zur Prüfung von positionsabhängigen Abtastsignalen |
DE19652562C2 (de) * | 1996-12-17 | 1999-07-22 | Heidenhain Gmbh Dr Johannes | Positionsmeßeinrichtung |
DE19730259C1 (de) * | 1997-07-09 | 1999-02-04 | Siemens Ag | Verfahren und Anordnung zum Prüfen eines Doppelsensorsystems |
DE19916217A1 (de) * | 1999-04-10 | 2000-10-26 | Tr Electronic Gmbh | Absolutes Positionsmeßsystem |
DE19920596C2 (de) * | 1999-05-05 | 2003-10-30 | Maerzhaeuser Senso Tech Gmbh | Verfahren zum Messen der Relativlage zweier Objekte |
EP1085291B1 (de) | 1999-09-16 | 2009-11-11 | Dr. Johannes Heidenhain GmbH | Vorrichtung zur Positionsbestimmung und Ermittlung von Führungsfehlern |
DE19962278A1 (de) | 1999-12-23 | 2001-08-02 | Heidenhain Gmbh Dr Johannes | Positionsmeßeinrichtung |
JP2004163302A (ja) * | 2002-11-14 | 2004-06-10 | Harmonic Drive Syst Ind Co Ltd | 光学式エンコーダ |
DE102005047658B4 (de) * | 2005-10-05 | 2008-03-20 | Leuze Electronic Gmbh + Co. Kg | Vorrichtung zur Positionsbestimmung |
DE102014209004A1 (de) * | 2014-05-13 | 2015-11-19 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
DE112016001860T5 (de) | 2015-04-22 | 2018-01-18 | Faro Technologies, Inc. | Indexierter optischer Drehgeber |
US10455216B2 (en) | 2015-08-19 | 2019-10-22 | Faro Technologies, Inc. | Three-dimensional imager |
CN106001927B (zh) * | 2016-07-05 | 2018-03-23 | 温州大学激光与光电智能制造研究院 | 一种测量加工一体化的激光平整化抛光方法 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2220427A (en) * | 1936-03-21 | 1940-11-05 | Ericsson Telefon Ab L M | Burglar alarm system |
DE876162C (de) * | 1941-04-30 | 1953-05-11 | Genevoise Instr Physique | Photoelektrische Praezisionsvorrichtung fuer die Einstellung eines beweglichen Objektes in eine genaue vorausbestimmte Lage |
US3421009A (en) * | 1966-06-14 | 1969-01-07 | Felix P Caruthers | Temperature compensated photosensor system |
US3534360A (en) * | 1966-12-27 | 1970-10-13 | Baldwin Electronics Inc | Analog to digital encoder |
US3544800A (en) * | 1968-11-20 | 1970-12-01 | Quantic Ind Inc | Optical apparatus for encoding angular movement of a rotating shaft |
DE1814785A1 (de) * | 1968-12-14 | 1970-06-25 | Johannes Heidenhain Feinmechan | Zaehlanordnung |
BE756467A (fr) * | 1969-09-24 | 1971-03-22 | Philips Nv | Dispositif pour aligner des objets, comportant une source lumineuse, unsysteme de detection photosensible et deux porteurs pour configuration |
JPS5047528A (ja) * | 1973-08-27 | 1975-04-28 | ||
SE379241B (ja) * | 1974-01-15 | 1975-09-29 | Aga Ab | |
US4037161A (en) * | 1974-07-22 | 1977-07-19 | Baird-Atomic, Inc. | Ratio detector |
DE2540412B2 (de) * | 1975-09-11 | 1979-08-02 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Inkrementales Meßsystem |
US4078173A (en) * | 1976-06-24 | 1978-03-07 | Pertec Computer Corporation | Light amplitude control system for position and motion transducers |
DE2650422C2 (de) * | 1976-11-03 | 1979-05-10 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | AbstandsmeBgerät |
DE2732954C2 (de) * | 1977-07-21 | 1979-07-05 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Inkrementales Lagemeßsystem |
DE2811807A1 (de) * | 1978-03-16 | 1979-09-20 | Joachim Dr Ing Wernicke | Digital-absoluter winkelkodierer nach dem nonius-prinzip |
-
1979
- 1979-12-22 DE DE2952106A patent/DE2952106C2/de not_active Expired
-
1980
- 1980-10-29 CH CH8035/80A patent/CH649629A5/de not_active IP Right Cessation
- 1980-11-27 AT AT0579480A patent/AT385124B/de not_active IP Right Cessation
- 1980-12-11 US US06/215,410 patent/US4403859A/en not_active Expired - Lifetime
- 1980-12-19 JP JP17915380A patent/JPS5698604A/ja active Granted
- 1980-12-19 FR FR8027103A patent/FR2473171A1/fr active Granted
- 1980-12-19 IT IT12759/80A patent/IT1136225B/it active
- 1980-12-22 GB GB8040945A patent/GB2067282B/en not_active Expired
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5837515A (ja) * | 1981-08-10 | 1983-03-04 | Yokogawa Hewlett Packard Ltd | 光変調装置 |
JPS60183818U (ja) * | 1984-05-16 | 1985-12-06 | 東洋電装株式会社 | 回転エンコ−ダ |
JPS6474411A (en) * | 1987-09-16 | 1989-03-20 | Yamaha Corp | Position detector |
JP2003065803A (ja) * | 2001-08-28 | 2003-03-05 | Mitsutoyo Corp | 光電式エンコーダ |
JP4703059B2 (ja) * | 2001-08-28 | 2011-06-15 | 株式会社ミツトヨ | 光電式エンコーダ |
Also Published As
Publication number | Publication date |
---|---|
FR2473171A1 (fr) | 1981-07-10 |
ATA579480A (de) | 1987-07-15 |
GB2067282B (en) | 1983-11-16 |
JPH0318130B2 (ja) | 1991-03-11 |
IT1136225B (it) | 1986-08-27 |
CH649629A5 (de) | 1985-05-31 |
DE2952106A1 (de) | 1981-07-02 |
AT385124B (de) | 1988-02-25 |
US4403859A (en) | 1983-09-13 |
DE2952106C2 (de) | 1982-11-04 |
IT8012759A0 (it) | 1980-12-19 |
FR2473171B1 (ja) | 1985-03-08 |
GB2067282A (en) | 1981-07-22 |
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