JPS5694673A - Semiconductor junction capacity device and manufacture thereof - Google Patents
Semiconductor junction capacity device and manufacture thereofInfo
- Publication number
- JPS5694673A JPS5694673A JP16933179A JP16933179A JPS5694673A JP S5694673 A JPS5694673 A JP S5694673A JP 16933179 A JP16933179 A JP 16933179A JP 16933179 A JP16933179 A JP 16933179A JP S5694673 A JPS5694673 A JP S5694673A
- Authority
- JP
- Japan
- Prior art keywords
- region
- layer
- film
- type
- struck
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000005530 etching Methods 0.000 abstract 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 238000009792 diffusion process Methods 0.000 abstract 2
- 239000012535 impurity Substances 0.000 abstract 2
- 150000002500 ions Chemical class 0.000 abstract 2
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 239000007788 liquid Substances 0.000 abstract 1
- 238000001259 photo etching Methods 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/92—Capacitors with potential-jump barrier or surface barrier
- H01L29/93—Variable capacitance diodes, e.g. varactors
Abstract
PURPOSE:To obtain a vari-cap with little floating capacity by nullifyig or reducing to the least the lateral protrusion of an inverse-continuity-type region when a diffusion region of equal electroform and of high density is provided within a semiconductor layer of low impurity density and the shallow inverse-continuity-type region is formed there. CONSTITUTION:An n<-> type layer 2 is made to grow epitaxially on an n<+> type Si substrate 1, the whole surface is covered with an SiO2 film 3 and an window having a prescribed angle is opened by photoetching of the film 3. Next, donor impurity ions of P or As or the like are struck therein and thereby an n<+> type region 4 is formed in the layer 2. On the occasion, the ions are struck not only in the surface of the region 4 but also in the lateral surface of the film 3, whereby a damage layer 7 is to be formed. Thus, by utilizing the high etching speed of the damage layer 7, the layer 7 is removed rapidly by using a nonacid etching liquid and thereby the expansion of the window is reduced as much as possible. After that, B diffusion is performed with the film 3' after etching being left as it is and thus the shallow p<+> region 6' with little amount of protrusion outside the region 4 is obtained as a varistor with little floating capacity.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16933179A JPS5694673A (en) | 1979-12-27 | 1979-12-27 | Semiconductor junction capacity device and manufacture thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16933179A JPS5694673A (en) | 1979-12-27 | 1979-12-27 | Semiconductor junction capacity device and manufacture thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5694673A true JPS5694673A (en) | 1981-07-31 |
JPS6327867B2 JPS6327867B2 (en) | 1988-06-06 |
Family
ID=15884560
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16933179A Granted JPS5694673A (en) | 1979-12-27 | 1979-12-27 | Semiconductor junction capacity device and manufacture thereof |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5694673A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5896774A (en) * | 1981-12-04 | 1983-06-08 | Mitsubishi Electric Corp | Manufacture of super-stepped type junction diode |
JPS5976422A (en) * | 1982-10-26 | 1984-05-01 | Oki Electric Ind Co Ltd | Manufacture of semiconductor device |
US4868134A (en) * | 1987-08-31 | 1989-09-19 | Toko, Inc. | Method of making a variable-capacitance diode device |
US5017950A (en) * | 1989-01-19 | 1991-05-21 | Toko, Inc. | Variable-capacitance diode element having wide capacitance variation range |
US5024955A (en) * | 1989-01-19 | 1991-06-18 | Toko, Inc. | Variable-capacitance diode element having wide capacitance variation range |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4826480A (en) * | 1971-08-11 | 1973-04-07 | ||
JPS5269266A (en) * | 1975-12-08 | 1977-06-08 | Fujitsu Ltd | Production of semiconductor device |
-
1979
- 1979-12-27 JP JP16933179A patent/JPS5694673A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4826480A (en) * | 1971-08-11 | 1973-04-07 | ||
JPS5269266A (en) * | 1975-12-08 | 1977-06-08 | Fujitsu Ltd | Production of semiconductor device |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5896774A (en) * | 1981-12-04 | 1983-06-08 | Mitsubishi Electric Corp | Manufacture of super-stepped type junction diode |
JPS5976422A (en) * | 1982-10-26 | 1984-05-01 | Oki Electric Ind Co Ltd | Manufacture of semiconductor device |
US4868134A (en) * | 1987-08-31 | 1989-09-19 | Toko, Inc. | Method of making a variable-capacitance diode device |
US5017950A (en) * | 1989-01-19 | 1991-05-21 | Toko, Inc. | Variable-capacitance diode element having wide capacitance variation range |
US5024955A (en) * | 1989-01-19 | 1991-06-18 | Toko, Inc. | Variable-capacitance diode element having wide capacitance variation range |
Also Published As
Publication number | Publication date |
---|---|
JPS6327867B2 (en) | 1988-06-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5694673A (en) | Semiconductor junction capacity device and manufacture thereof | |
JPS5649554A (en) | Manufacture of semiconductor memory | |
JPS5688356A (en) | Manufacture of memory cell | |
JPS54139490A (en) | Semiconductor memory unit | |
JPS5475273A (en) | Manufacture of semiconductor device | |
JPS54148486A (en) | Semiconductor device | |
JPS5637663A (en) | Capacitor | |
JPS54102876A (en) | Manufacture for planer type semiconductor device | |
JPS57143841A (en) | Insulation separating composition | |
JPS5710987A (en) | Silicon avalanche photo diode | |
JPS574173A (en) | Semiconductor device | |
JPS5380160A (en) | Manufacture of substrate for semiconductor device | |
JPS5637664A (en) | Semiconductor device | |
JPS5561070A (en) | Semiconductor device | |
JPS5513992A (en) | Semiconductor device | |
JPS5666075A (en) | Manufacture of semiconductor device | |
JPS5464480A (en) | Semiconductor device | |
JPS57128062A (en) | Semiconductor device and manufacture thereof | |
JPS57128079A (en) | Manufacture of p-n junction element | |
JPS5655060A (en) | Semiconductor integrated circuit device | |
JPS5632755A (en) | Semiconductor device | |
JPS5650576A (en) | Manufacture of semiconductor device | |
JPS55166962A (en) | Manufacture of semiconductor device | |
JPS5749222A (en) | Manufacture of semiconductor device | |
JPS5670660A (en) | Semiconductor device |