JPS569161A - Grinding method for ceramic or crystallized substrate - Google Patents

Grinding method for ceramic or crystallized substrate

Info

Publication number
JPS569161A
JPS569161A JP8205579A JP8205579A JPS569161A JP S569161 A JPS569161 A JP S569161A JP 8205579 A JP8205579 A JP 8205579A JP 8205579 A JP8205579 A JP 8205579A JP S569161 A JPS569161 A JP S569161A
Authority
JP
Japan
Prior art keywords
substrate
warpage
convex
effected
ceramic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8205579A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6240141B2 (https=
Inventor
Kikuo Shibuya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokin Corp
Original Assignee
Tohoku Metal Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tohoku Metal Industries Ltd filed Critical Tohoku Metal Industries Ltd
Priority to JP8205579A priority Critical patent/JPS569161A/ja
Publication of JPS569161A publication Critical patent/JPS569161A/ja
Publication of JPS6240141B2 publication Critical patent/JPS6240141B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
JP8205579A 1979-06-30 1979-06-30 Grinding method for ceramic or crystallized substrate Granted JPS569161A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8205579A JPS569161A (en) 1979-06-30 1979-06-30 Grinding method for ceramic or crystallized substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8205579A JPS569161A (en) 1979-06-30 1979-06-30 Grinding method for ceramic or crystallized substrate

Publications (2)

Publication Number Publication Date
JPS569161A true JPS569161A (en) 1981-01-30
JPS6240141B2 JPS6240141B2 (https=) 1987-08-26

Family

ID=13763820

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8205579A Granted JPS569161A (en) 1979-06-30 1979-06-30 Grinding method for ceramic or crystallized substrate

Country Status (1)

Country Link
JP (1) JPS569161A (https=)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62106752U (https=) * 1985-12-26 1987-07-08
JP2000084838A (ja) * 1998-09-04 2000-03-28 Nec Kansai Ltd 研磨装置及び研磨方法
CN116160321A (zh) * 2022-12-14 2023-05-26 上海中晶企业发展有限公司 光学镜片平面面形补偿抛光方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62106752U (https=) * 1985-12-26 1987-07-08
JP2000084838A (ja) * 1998-09-04 2000-03-28 Nec Kansai Ltd 研磨装置及び研磨方法
CN116160321A (zh) * 2022-12-14 2023-05-26 上海中晶企业发展有限公司 光学镜片平面面形补偿抛光方法

Also Published As

Publication number Publication date
JPS6240141B2 (https=) 1987-08-26

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