JPS5691435A - Plasma vapor growing method - Google Patents

Plasma vapor growing method

Info

Publication number
JPS5691435A
JPS5691435A JP16903079A JP16903079A JPS5691435A JP S5691435 A JPS5691435 A JP S5691435A JP 16903079 A JP16903079 A JP 16903079A JP 16903079 A JP16903079 A JP 16903079A JP S5691435 A JPS5691435 A JP S5691435A
Authority
JP
Japan
Prior art keywords
reaction gas
coating film
arc discharge
high frequency
semiconductor substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16903079A
Other languages
English (en)
Other versions
JPS6310892B2 (ja
Inventor
Kanetake Takasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP16903079A priority Critical patent/JPS5691435A/ja
Publication of JPS5691435A publication Critical patent/JPS5691435A/ja
Publication of JPS6310892B2 publication Critical patent/JPS6310892B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
    • C23C16/509—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes
    • C23C16/5096—Flat-bed apparatus

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
JP16903079A 1979-12-25 1979-12-25 Plasma vapor growing method Granted JPS5691435A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16903079A JPS5691435A (en) 1979-12-25 1979-12-25 Plasma vapor growing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16903079A JPS5691435A (en) 1979-12-25 1979-12-25 Plasma vapor growing method

Publications (2)

Publication Number Publication Date
JPS5691435A true JPS5691435A (en) 1981-07-24
JPS6310892B2 JPS6310892B2 (ja) 1988-03-10

Family

ID=15879012

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16903079A Granted JPS5691435A (en) 1979-12-25 1979-12-25 Plasma vapor growing method

Country Status (1)

Country Link
JP (1) JPS5691435A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63246829A (ja) * 1986-12-19 1988-10-13 アプライド　マテリアルズインコーポレーテッド Ｔｅｏｓプラズマｃｖｄ法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63246829A (ja) * 1986-12-19 1988-10-13 アプライド　マテリアルズインコーポレーテッド Ｔｅｏｓプラズマｃｖｄ法
JPH0612771B2 (ja) * 1986-12-19 1994-02-16 アプライド マテリアルズインコーポレーテッド Ｔｅｏｓプラズマｃｖｄ法
US6167834B1 (en) 1986-12-19 2001-01-02 Applied Materials, Inc. Thermal CVD/PECVD reactor and use for thermal chemical vapor deposition of silicon dioxide and in-situ multi-step planarized process

Also Published As

Publication number Publication date
JPS6310892B2 (ja) 1988-03-10

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